SEMICONDUCTOR DEVICE
    1.
    发明申请

    公开(公告)号:US20240421012A1

    公开(公告)日:2024-12-19

    申请号:US18210134

    申请日:2023-06-15

    Abstract: A semiconductor device includes a first semiconductor chip having a first through silicon via (TSV). A second semiconductor chip is arranged on the first semiconductor chip and includes a second TSV positioned on a same vertical line as the first TSV. A conductive pad is disposed on each of the first TSV and the second TSV. The conductive pad electrically connects the first semiconductor chip and the second semiconductor chip to each other. A warpage prevention metal structure is disposed on an upper surface of the first semiconductor chip or an upper surface of the second semiconductor chip.

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