公开(公告)号：US3504175A

公开(公告)日：1970-03-31

申请号：US3504175D

申请日：1966-09-19

Applicant: RESEARCH CORP

Inventor： MUELLER ERWIN W

IPC: H01J37/04 ,  H01J37/08 ,  H01J37/27 ,  H01J37/26

CPC classification number: H01J37/08 ,  H01J37/04 ,  H01J37/27 ,  H01J2237/0807 ,  H01J2237/2812

公开(公告)号：US3602710A

公开(公告)日：1971-08-31

申请号：US3602710D

申请日：1969-05-07

Applicant: RESEARCH CORP

Inventor： MUELLER ERWIN W

IPC: G01Q30/12 ,  G01Q80/00 ,  H01J37/05 ,  H01J37/285 ,  H01J49/30 ,  H01J39/34

CPC classification number: H01J49/30 ,  H01J37/05 ,  H01J37/285

Abstract: A field ion microscope capable of isolating and analyzing one or a few atoms of a specimen comprises a field ion microscope section including an emitter tip mounting the specimen to be examined, an apertured screen in the path of the beam of ions emitted by the specimen and means for adjusting the path traversed by the ion beam with respect to the aperture in the screen to cause a selected area of the beam to pass through the aperture and an ion detector positioned in the path of ions passing through the aperture. The path of the ion beam emitted by the specimen by the application of a high voltage may be altered by beam-deflecting means adjacent the beam path or by varying the angular disposition of the emitter tip with respect to the image screen, or the beam may be allowed to drift through a long tube and measured in its time-of-flight in each case using a detector of single particle sensitivity.