公开(公告)号：US20160363872A1

公开(公告)日：2016-12-15

申请号：US15121479

申请日：2015-02-26

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Matthew SENDELBACH ,  Niv SARIG ,  Charles N. ARCHIE

IPC: G03F7/20 ,  H01J37/28

CPC classification number: G03F7/70625 ,  G01B2210/56 ,  H01J37/28 ,  H04B17/309 ,  H04B17/3912

Abstract: A method for use in planning metrology measurements, the method comprising: providing inverse total measurement uncertainty (TMU) analysis equations for upper and lower confidence limits TMUUL and TMULL of the TMU being independent on prior knowledge of measurements by a tool under test (TuT) and a reference measurement system (RMS), thereby enabling estimation of input parameters for said equations prior to conducting an experiment of the TMU analysis; and determining at least one of a total number N of samples to be measured in the TMU analysis and an average number ns of measurements per sample by the RMS.

Abstract translation: 一种用于规划度量测量的方法，所述方法包括：提供用于上限和下限置信限的反向总测量不确定度（TMU）分析方程，TMUU和TMU独立于被测试工具（TuT）的现有测量知识， 和参考测量系统（RMS），从而能够在进行TMU分析的实验之前估计所述方程式的输入参数; 并且在TMU分析中确定待测量的样本的总数N中的至少一个，并且通过RMS确定每个样本的平均数ns。