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公开(公告)号：US11984294B2
公开(公告)日：2024-05-14
申请号：US17622994
申请日：2020-06-29
Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
Inventor： Jie Tang , Shuai Tang , Ta-Wei Chiu , Wataru Hayami , Luchang Qin
IPC: H01J37/065
CPC classification number: H01J37/065 , H01J2237/06316 , H01J2237/06341
Abstract: The present invention provides an emitter made of a hafnium carbide (HfC) single crystal that stably emits electrons with high efficiency, a method for manufacturing the emitter, and an electron gun and an electronic device using the emitter. An emitter according to an embodiment of the present invention is an emitter including a nanowire, in which the nanowire is made of the hafnium carbide (HfC) single crystal, at least an end of the nanowire through which electrons are to be emitted is coated with hafnium oxycarbide (HfC1-xOx: 0
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公开(公告)号：US11915920B2
公开(公告)日：2024-02-27
申请号：US17768017
申请日：2020-10-20
Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
Inventor： Jie Tang , Shuai Tang , Ta-Wei Chiu , Tadakatsu Ohkubo , Jun Uzuhashi , Kazuhiro Hono , Luchang Qin
Abstract: The present invention provides a simpler method for sharpening a tip of an emitter. In addition, the present invention provides an emitter including a nanoneedle made of a single crystal material, an emitter including a nanowire made of a single crystal material such as hafnium carbide (HfC), both of which stably emit electrons with high efficiency, and an electron gun and an electronic device using any one of these emitters. A method for manufacturing the emitter according to an embodiment of the present invention comprises processing a single crystal material in a vacuum using a focused ion beam to form an end of the single crystal material, through which electrons are to be emitted, into a tapered shape, wherein the processing is performed in an environment in which a periphery of the single crystal material fixed to a support is opened.
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