公开(公告)号：US11486899B2

公开(公告)日：2022-11-01

申请号：US16778746

申请日：2020-01-31

Applicant: NANYA TECHNOLOGY CORPORATION

Inventor： Chia-Lin Tsai ,  Wun-Ye Ku ,  Tien-Yu Chen ,  Chia-Yi Lin

IPC: G01R1/073 ,  G01R31/3193 ,  G01R31/319 ,  G01R1/067

Abstract: A wafer test system includes a probe apparatus, a data server, an automation subsystem, and a probe mark assessment subsystem. The probe apparatus includes a probe card, a tester, and a camera. The probe card includes probe pins for contacting test pads in the wafer, and the camera captures an image of the test pads. The automation subsystem obtains an image specification from the probe apparatus and triggers an automated assessment of a probe mark in the image of the test pads. The probe mark assessment subsystem performs the automated assessment of the probe mark in the image of the test pads. The probe mark assessment subsystem performs an image-processing operation to obtain a probe mark assessment result, and the automation subsystem stops the probe apparatus if the probe mark assessment result indicates a probe test failure.