公开(公告)号：US20030223103A1

公开(公告)日：2003-12-04

申请号：US10437290

申请日：2003-05-14

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Euisik Yoon ,  Jun-Bo Yoon ,  Hyung-Kew Lee ,  Ji-Hyuk Kim

IPC: G02B026/00

CPC classification number: G02B26/0841

Abstract: Disclosed is a micromirror actuator with the degrees of freedom of two axes operated by an electrostatic force. The micromirror actuator comprises: a substrate provided with an insulating layer formed thereon; two lower columns spaced from each other by a designated distance, and formed on the insulating layer; a first torsion bar extending over upper surfaces of the lower columns; a second torsion bar formed so that the first and second torsion bars are orthogonal to each other; four electrodes, each disposed in four areas formed by the orthogonal crossing of the first and second torsion bars, formed on the insulating layer; two upper columns formed on an upper surface of the second torsion bar so that upper surfaces of the upper columns are located at higher positions than upper surfaces of the electrodes; and a micromirror located on the upper surfaces of the upper columns so that the micromirror is supported by the upper columns. In the micromirror actuator, the micromirror is elevated to a desired height by means of two upper columns, and the dimensions of its structure are reduced by locating torsion bars under the micromirror. Further, the micromirror actuator allows the micromirror to be selectively tilted centering on two torsion bars depending on electrodes to which voltage is applied, thus being used as a three-dimensional optical switch.

Abstract translation: 公开了具有通过静电力操作的两个轴的自由度的微镜致动器。 微反射镜致动器包括：在其上形成有绝缘层的基板; 两个下列彼此间隔开指定距离，并形成在绝缘层上; 延伸在下列的上表面上的第一扭杆; 形成为使得第一和第二扭杆彼此正交的第二扭杆; 四个电极，每个设置在由绝缘层上形成的第一和第二扭杆的正交交叉形成的四个区域中; 两个上柱形成在第二扭杆的上表面上，使得上列的上表面位于比电极的上表面更高的位置处; 以及位于上列的上表面上的微镜，使得微反射镜由上列支撑。 在微镜致动器中，微镜通过两个上柱升高到所需的高度，并且通过在微反射镜下方定位扭杆来减小其结构的尺寸。 此外，微镜致动器允许微镜根据施加电压的电极以两个扭杆为中心选择性地倾斜，因此被用作三维光开关。