公开(公告)号：US20130169957A1

公开(公告)日：2013-07-04

申请号：US13675687

申请日：2012-11-13

Applicant: KLA-Tencor Corporation

Inventor： Ralph C. Wolf ,  Grace H. Chen ,  Kai Cao ,  Jamie M. Sullivan ,  Paul J. Donders ,  Derek C. Mackay

IPC: G01N21/88

CPC classification number: G01N21/00 ,  G01B11/24 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956

Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. An incident beam is directed across a plurality of consecutive scan portions of a specimen so that an output beam profile from each scan portion is consecutively collected by a photomultiplier tube (PMT), and the scan portions include at least one or more first scan portions and a next scan portion that is scanned after the one or more first scan portions. After or while the incident beam is directed to the one or more first scan portions of the specimen, an output signal for each first scan portion is obtained based on the output beam profile that is collected by the PMT for each first scan portion. An expected output beam profile for the next scan portion is determined based on the output signal that is obtained for each one or more first scan portions. As the incident beam is directed towards the next scan portion, a gain input to the PMT for the next scan portion is set based on the expected output beam profile so that the gain for such next scan portion results in a measured signal at the PMT that is within a predefined specification of the PMT or other hardware components that receive a measured signal from the PMT.

Abstract translation: 公开了用于检查或测量样本的装置和方法。 入射光束穿过样本的多个连续的扫描部分，使得来自每个扫描部分的输出光束轮廓由光电倍增管（PMT）连续收集，并且扫描部分包括至少一个或多个第一扫描部分和 在所述一个或多个第一扫描部分之后被扫描的下一个扫描部分。 在入射光束被引导到样本的一个或多个第一扫描部分之后或之后，基于由PMT针对每个第一扫描部分收集的输出光束轮廓，获得每个第一扫描部分的输出信号。 基于对于每个一个或多个第一扫描部分获得的输出信号来确定用于下一扫描部分的预期输出光束轮廓。 当入射光束被引导到下一个扫描部分时，基于预期的输出光束分布来设置输入到下一个扫描部分的PMT的增益，使得这样的下一扫描部分的增益导致PMT处的测量信号， 在接收来自PMT的测量信号的PMT或其他硬件组件的预定义规范内。

公开(公告)号：US09389166B2

公开(公告)日：2016-07-12

申请号：US13675687

申请日：2012-11-13

Applicant: KLA-Tencor Corporation

Inventor： Ralph C. Wolf ,  Grace H. Chen ,  Kai Cao ,  Jamie M. Sullivan ,  Paul J. Donders ,  Derek C. Mackay

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G01B11/24

CPC classification number: G01N21/00 ,  G01B11/24 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956

Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. An incident beam is directed across a plurality of consecutive scan portions of a specimen so that an output beam profile from each scan portion is consecutively collected by a photomultiplier tube (PMT), and the scan portions include at least one or more first scan portions and a next scan portion that is scanned after the one or more first scan portions. After or while the incident beam is directed to the one or more first scan portions of the specimen, an output signal for each first scan portion is obtained based on the output beam profile that is collected by the PMT for each first scan portion. An expected output beam profile for the next scan portion is determined based on the output signal that is obtained for each one or more first scan portions. As the incident beam is directed towards the next scan portion, a gain input to the PMT for the next scan portion is set based on the expected output beam profile so that the gain for such next scan portion results in a measured signal at the PMT that is within a predefined specification of the PMT or other hardware components that receive a measured signal from the PMT.

Abstract translation: 公开了用于检查或测量样本的装置和方法。 入射光束穿过样本的多个连续的扫描部分，使得来自每个扫描部分的输出光束轮廓由光电倍增管（PMT）连续收集，并且扫描部分包括至少一个或多个第一扫描部分和 在所述一个或多个第一扫描部分之后被扫描的下一个扫描部分。 在入射光束被引导到样本的一个或多个第一扫描部分之后或之后，基于由PMT针对每个第一扫描部分收集的输出光束轮廓，获得每个第一扫描部分的输出信号。 基于对于每个一个或多个第一扫描部分获得的输出信号来确定用于下一扫描部分的预期输出光束轮廓。 当入射光束被引导到下一个扫描部分时，基于预期的输出光束分布来设置输入到下一个扫描部分的PMT的增益，使得这样的下一扫描部分的增益导致PMT处的测量信号， 在接收来自PMT的测量信号的PMT或其他硬件组件的预定义规范内。