公开(公告)号：US09909982B2

公开(公告)日：2018-03-06

申请号：US14244179

申请日：2014-04-03

Applicant: KLA-Tencor Corporation

Inventor： Barak Bringoltz ,  Irina Vakshtein ,  Ofir Aharon ,  Guy Ben Dov ,  Zeev Bomzon

IPC: G01C19/00 ,  G01N21/47 ,  G03F7/20

CPC classification number: G01N21/4785 ,  G03F7/70633

Abstract: Methods and calibrations modules are provided, for calibrating a pupil center in scatterometry overlay measurements. The calibration comprises calculating fluctuations from a first statistical figure of merit such as an average of an overlay signal per pixel at the pupil and significantly reducing, for example minimizing, the fluctuations with respect to a second statistical figure of merit thereof, such as a pupil weighted variance of the fluctuations.

公开(公告)号：US20140257734A1

公开(公告)日：2014-09-11

申请号：US14244179

申请日：2014-04-03

Applicant: KLA-Tencor Corporation

Inventor： Barak Bringoltz ,  Irina Vakshtein ,  Ofir Aharon ,  Guy Ben Dov ,  Zeev Bomzon

IPC: G01N21/47 ,  G01B11/00

CPC classification number: G01N21/4785 ,  G03F7/70633

Abstract: Methods and calibrations modules are provided, for calibrating a pupil center in scatterometry overlay measurements. The calibration comprises calculating fluctuations from a first statistical figure of merit such as an average of an overlay signal per pixel at the pupil and significantly reducing, for example minimizing, the fluctuations with respect to a second statistical figure of merit thereof, such as a pupil weighted variance of the fluctuations.

Abstract translation: 提供了方法和校准模块，用于在散射测量叠加测量中校准瞳孔中心。 校准包括从第一统计品质因数计算波动，例如在瞳孔处的每个像素的覆盖信号的平均值，并且显着地减少例如相对于其第二统计品质因数例如瞳孔的波动最小化 波动的加权方差。