公开(公告)号：US12164093B2

公开(公告)日：2024-12-10

申请号：US17505591

申请日：2021-10-19

Applicant: KLA CORPORATION

Inventor： Alex Zheng ,  Jun Wang ,  David Y. Wang ,  Chunxia Li ,  Changfei Yan ,  Rui Ni ,  Lansheng Dong ,  Yang Zhou ,  Hai-Yang You ,  Haijing Peng ,  Walter H. Johnson ,  Shankar Krishnan ,  Jianou Shi

IPC: G02B17/06 ,  G02B5/10

Abstract: A Cassegrain or quasi-Cassegrain structure objective lens is used in a polar MOKE metrology system. The quasi-Cassegrain reflective objective lens includes a primary concave mirror and a secondary mirror. The primary concave mirror has a wider diameter than the secondary mirror and defines an aperture through which the laser beam is configured to be transmitted toward the secondary mirror. The secondary mirror can be convex, concave, or have a flat surface.

公开(公告)号：US11043239B2

公开(公告)日：2021-06-22

申请号：US16821192

申请日：2020-03-17

Applicant: KLA Corporation

Inventor： Jun Wang ,  Yaolei Zheng ,  Chunxia Li ,  Changfei Yan ,  Lansheng Dong ,  Yang Zhou ,  Hai-Yang You ,  Haijing Peng ,  Jianou Shi ,  Rui Ni ,  Shankar Krishnan ,  David Y. Wang ,  Walter H. Johnson

IPC: G11B11/105

Abstract: A laser beam is directed through a transmissive axicon telescope or a reflective axicon telescope such as in a magneto-optic Kerr effect metrology system. With the transmissive axicon telescope, a Gaussian beam profile is directed through a first axicon lens and a second axicon lens. The first axicon lens and second axicon lens transfer the Gaussian beam profile of the laser beam to a hollowed laser ring. The laser beam with a hollowed laser ring can be directed through a Schwarzschild reflective objective. With the reflective axicon telescope, the laser beam is directed through two conical mirrors that are fully reflective. One of the conical mirrors defines a central hole that the laser beam passes through.

公开(公告)号：US20200302965A1

公开(公告)日：2020-09-24

申请号：US16821192

申请日：2020-03-17

Applicant: KLA Corporation

Inventor： Jun Wang ,  Yaolei Zheng ,  Chunxia Li ,  Changfei Yan ,  Lansheng Dong ,  Yang Zhou ,  Hai-Yang You ,  Haijing Peng ,  Jianou Shi ,  Rui Ni ,  Shankar Krishnan ,  David Y. Wang ,  Walter H. Johnson ,  Barry Blasenheim

IPC: G11B11/105

Abstract: A laser beam is directed through a transmissive axicon telescope or a reflective axicon telescope such as in a magneto-optic Kerr effect metrology system. With the transmissive axicon telescope, a Gaussian beam profile is directed through a first axicon lens and a second axicon lens. The first axicon lens and second axicon lens transfer the Gaussian beam profile of the laser beam to a hollowed laser ring. The laser beam with a hollowed laser ring can be directed through a Schwarzschild reflective objective. With the reflective axicon telescope, the laser beam is directed through two conical mirrors that are fully reflective. One of the conical mirrors defines a central hole that the laser beam passes through.