公开(公告)号：US10381257B2

公开(公告)日：2019-08-13

申请号：US14840593

申请日：2015-08-31

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA ,  KAWASAKI ROBOTICS (USA), INC.

发明人： Mark Tang ,  Eric Chan ,  Shigeki Ono ,  Shinya Kitano ,  Ming Zeng ,  Hirohiko Goto

IPC分类号： B25J9/04 ,  H01L21/687 ,  H01L21/677

摘要： A control unit of a substrate conveying robot makes a robot arm and a substrate holding device execute a blade member advancing operation, a substrate receiving operation, and a substrate placing operation. The substrate holding device is configured to be capable of being switched between a first working state that a pair of blade members are arranged in the vertical direction and a second working state that a pair of blade members are arranged in a position out of the vertical direction and a single blade member can be advanced into a substrate placing structure.

公开(公告)号：US09929034B2

公开(公告)日：2018-03-27

申请号：US14844819

申请日：2015-09-03

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA ,  KAWASAKI ROBOTICS (USA), INC.

发明人： Hirohiko Goto ,  Ming Zeng ,  Avish Bharwani ,  Shigeki Ono

IPC分类号： G05B19/04 ,  G05B19/18 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/67766 ,  H01L21/67778 ,  H01L21/681 ,  H01L21/68707

摘要： A substrate transfer device includes a casing and a substrate conveying robot. A size of the casing in a second direction Y is more than a size of the casing in a first direction X. The casing includes walls forming a conveying chamber and at least one opening or provided at at least one side of the conveying chamber in the first direction X. The substrate conveying robot includes a base, a robot arm, a robot hand, and a controller. When a space in the conveying chamber except for a predetermined exclusive region is defined as an effective conveying chamber, an entire link length DL of a link is less than a conveying chamber size Dx, and an entire hand length Dh of the robot hand is not less than an effective conveying chamber size Dx′.