公开(公告)号：US20220376455A1

公开(公告)日：2022-11-24

申请号：US17817839

申请日：2022-08-05

Applicant: Gigaphoton Inc.

Inventor： Yoichi SASAKI ,  Kouji KAKIZAKI ,  Hakaru MIZOGUCHI

IPC: H01S3/036 ,  H01S3/038 ,  G03F7/20

Abstract: A laser device according to an aspect of the present disclosure includes a chamber into which laser gas is introduced; a pair of electrodes arranged in the chamber; a power source configured to apply a voltage between the electrodes; a nozzle structure which includes an internal passage for receiving the laser gas and a slit connected to the internal passage and is configured to generate flow of the laser gas between the electrodes due to the laser gas blowing out from the slit; a gas flow path which has a suction port through which the laser gas in the chamber is suctioned and introduces, to the nozzle structure, the laser gas suctioned through the suction port; and a blower device configured to cause the laser gas to blow toward the internal passage of the nozzle structure through the gas flow path.

公开(公告)号：US20240405497A1

公开(公告)日：2024-12-05

申请号：US18799444

申请日：2024-08-09

Applicant: Gigaphoton Inc.

Inventor： Yoichi SASAKI ,  Kouji KAKIZAKI ,  Hiroshi UMEDA

IPC: H01S3/038 ,  H01S3/034

Abstract: In a chamber of a gas laser apparatus, a distance from an imaginary axis extending along a predetermined direction to a first end portion between first and second primary electrodes increases from one side toward the other side in the predetermined direction, and a distance from the imaginary axis to a second end portion decreases from the one side toward the other side in the predetermined direction.

公开(公告)号：US20240405496A1

公开(公告)日：2024-12-05

申请号：US18799414

申请日：2024-08-09

Applicant: Gigaphoton Inc.

Inventor： Yoichi SASAKI ,  Junichi FUJIMOTO ,  Jeffrey P. SERCEL ,  Michael von DADELSZEN

IPC: H01S3/038 ,  G03F7/20

Abstract: A chamber for a gas laser device includes a first main electrode and a second main electrode arranged along a predetermined direction as being apart from and facing each other in the internal space, a window arranged at a wall surface of the chamber and transmitting light from the internal space, and a first preionization electrode arranged beside one side of the first main electrode. Here, the first preionization electrode includes a first dielectric pipe, a first preionization inner electrode arranged in the first dielectric pipe and extending along the first dielectric pipe, and a first preionization outer electrode extending along the first dielectric pipe and including a first end portion facing the first dielectric pipe with a first gap with respect to the first dielectric pipe. At least a part of the first gap is larger than 0 mm and equal to or smaller than 0.9 mm.

公开(公告)号：US20240396282A1

公开(公告)日：2024-11-28

申请号：US18796337

申请日：2024-08-07

Applicant: Gigaphoton Inc.

Inventor： Yoichi SASAKI ,  Junichi FUJIMOTO

IPC: H01S3/038 ,  G03F7/20

Abstract: A discharge electrode according to an aspect of the present disclosure is for use in a gas laser apparatus that excites a laser gas containing fluorine by discharge, and includes a cathode electrode that extends in one direction, and an anode electrode that extends in the one direction and that is disposed facing the cathode electrode in a discharge direction orthogonal to the one direction. At least one of the cathode electrode and the anode electrode includes an electrode substrate containing a metal, and a dielectric including a first layer having voids provided on a pair of side faces of the electrode substrate. A porosity of the first layer is in a range of 0.5% to 25%.

公开(公告)号：US20250141172A1

公开(公告)日：2025-05-01

申请号：US18882513

申请日：2024-09-11

Applicant: Gigaphoton Inc.

Inventor： Yoichi SASAKI ,  Osamu WAKABAYASHI

IPC: H01S3/036 ,  G03F7/00 ,  H01S3/225

Abstract: A laser device includes a laser chamber configured to accommodate laser gas including fluorine, a pair of discharge electrodes arranged inside the laser chamber, a gas supply port arranged in the laser chamber, and an XeF2 crystal to be vaporized as being arranged in an XeF2 vaporization space communicating with the gas supply port.

公开(公告)号：US20250096515A1

公开(公告)日：2025-03-20

申请号：US18968755

申请日：2024-12-04

Applicant: Gigaphoton Inc.

Inventor： Kazuki NAGAI ,  Yoichi SASAKI ,  Jeffrey P. SERCEL ,  Michael von DADELSZEN

IPC: H01S3/038 ,  H01S3/034 ,  H01S3/225

Abstract: A chamber for a gas laser device includes first and second main electrodes arranged with a longitudinal direction being along a predetermined direction as being spaced apart from and facing each other in the internal space, a window arranged at a wall surface of the chamber, and a first preionization electrode arranged beside one side of the first main electrode. The first preionization electrode includes a first dielectric pipe extending along the longitudinal direction, a first preionization inner electrode arranged in the first dielectric pipe and extending along the longitudinal direction, and a first preionization outer electrode extending along the longitudinal direction, including a first end portion facing an outer circumference surface of the first dielectric pipe, and extending from the first end portion in a direction away from the first dielectric pipe. In a plane perpendicular to the longitudinal direction, a first corona discharge angle is an acute angle.

公开(公告)号：US20240339797A1

公开(公告)日：2024-10-10

申请号：US18746278

申请日：2024-06-18

Applicant: Gigaphoton Inc.

Inventor： Yoichi SASAKI ,  Hiroshi UMEDA ,  Jeffrey P. SERCEL ,  Michael von DADELSZEN

IPC: H01S3/038 ,  G03F7/00

CPC classification number: H01S3/038 ,  G03F7/70025

Abstract: A gas laser device includes a laser chamber including an opening, an electrical insulating portion blocking the opening, a first electrode, and a second electrode facing the first electrode. The first electrode includes a contact region contacting the surface of the electrical insulating portion, an opposing surface facing the second electrode, and a first curved surface included in a region between the contact region and the opposing surface and convexly curved toward an outer side of the first electrode. In a cross section of the first electrode along a surface extending in a separation direction of the first electrode and the second electrode, the contact region is located on an inner side of the first electrode with respect to the first curved surface, and the first curved surface is a part of a circumference of a circle or an ellipse which does not intersect the electrical insulating portion.