公开(公告)号：US20240111219A1

公开(公告)日：2024-04-04

申请号：US18539324

申请日：2023-12-14

Applicant: Gigaphoton Inc.

Inventor： Shigeto KISHIMOTO ,  Hirotaka MIYAMOTO

IPC: G03F7/00 ,  H01S3/134

CPC classification number: G03F7/70575 ,  G03F7/70025 ,  H01S3/134

Abstract: A wavelength control method in a laser apparatus including a wavelength actuator configured to cyclically change the wavelength of pulse laser light output in the form of a burst includes reading data on a wavelength target value, determining from the data a first target wavelength and a second target wavelength shorter than the first target wavelength, and setting wavelengths of at least one first-period long wavelength pulse and at least one first-period short wavelength pulse contained in a first period at a start of a burst to a first set wavelength shorter than the first target wavelength and a second set wavelength longer than the second target wavelength, respectively, by using the first target wavelength and the second target wavelength to control the wavelength actuator.

公开(公告)号：US20240413600A1

公开(公告)日：2024-12-12

申请号：US18807533

申请日：2024-08-16

Applicant: Gigaphoton Inc.

Inventor： Shigeto KISHIMOTO ,  Hirotaka MIYAMOTO ,  Motoki NIWANO

IPC: H01S3/106 ,  G03F7/00 ,  H01S3/08 ,  H01S3/225

Abstract: A line narrowing laser device includes an optical element and a diffractive optical element positioned on an optical path of an optical resonator, a wavelength actuator configured to change an incident angle of light incident on the diffractive optical element by moving the optical element, a wavelength driver configured to drive the wavelength actuator, a processor configured to output a wavelength control signal to the wavelength driver so that a wavelength of pulse laser light output from the optical resonator periodically changes, and a notch filter arranged in a path of the wavelength control signal and configured to operate at a notch frequency different from a drive frequency of the wavelength actuator.