OPTICAL PULSE STRETCHER, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20250105576A1

    公开(公告)日:2025-03-27

    申请号:US18797561

    申请日:2024-08-08

    Abstract: An optical pulse stretcher includes a beam splitter separating laser light incident on an optical surface thereof into reflection laser light and transmission laser light, a holder fixing the beam splitter with the optical surface of the beam splitter inclined with respect to an optical path axis of the incident laser light, mirrors guiding the reflection laser light to the beam splitter, and a slide mechanism moving the beam splitter in a direction parallel to the optical surface. The slide mechanism includes a slide plate to which the holder is coupled, and a case which holds the slide plate in a movable manner in a slide direction with respect to a base plate on which the mirrors are arranged. The case includes a threaded hole having an internal thread formed on an inner circumference thereof. The slide plate includes a through hole at a position corresponding to the threaded hole.

    LINE NARROWING MODULE, MANUFACTURING METHOD OF LINE NARROWING MODULE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20250070526A1

    公开(公告)日:2025-02-27

    申请号:US18938048

    申请日:2024-11-05

    Abstract: A line narrowing module includes a mirror including a bottom surface and a reflection surface of light; a grating configured to wavelength-disperse the light reflected by the reflection surface; a base plate to which the bottom surface of the mirror is fixed with an adhesive; a rotation stage configured to rotate the base plate, arranged thereon, about a rotation axis perpendicular to a plane in which the light is wavelength-dispersed to rotate the mirror about the rotation axis; and a drive unit configured to rotate the rotation stage about the rotation axis. A centroid of the mirror, a centroid of the adhesive, a centroid of the base plate, and a centroid of the rotation stage are located on the rotation axis.

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