公开(公告)号：US20170045473A1

公开(公告)日：2017-02-16

申请号：US15190651

申请日：2016-06-23

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Young-Jun YU ,  Hong Kyw CHOI ,  Choon Gi CHOI ,  Jin Tae KIM ,  Young Kyu CHOI ,  Jin Sik CHOI

IPC: G01N27/414 ,  H01L21/02 ,  H01L29/45 ,  H01L29/16 ,  H01L29/24

CPC classification number: G01N27/4141

Abstract: Provided herein is a gas sensor that includes a substrate, an insulating layer provided on the substrate, a first active layer disposed on the insulating layer, a second active layer which is disposed on the insulating layer and undergoes heterojunction with a portion of the first active layer, a first electrode and a second electrode which are disposed on the first active layer and are spaced apart from each other at a predetermined interval, and a third electrode and a fourth electrode which are disposed on the second active layer and are spaced apart from each other at a predetermined interval. The first active layer and the second active layer include different materials.

Abstract translation: 本发明提供了一种气体传感器，其包括基板，设置在基板上的绝缘层，设置在绝缘层上的第一有源层，设置在绝缘层上并与第一主动部分的一部分发生异质结的第二有源层 层，第一电极和第二电极，其设置在第一有源层上并且以预定间隔彼此间隔开;第三电极和第四电极，被布置在第二有源层上并与第二有源层间隔开 彼此以预定的间隔。 第一活性层和第二活性层包括不同的材料。