公开(公告)号：US09618823B2

公开(公告)日：2017-04-11

申请号：US14430182

申请日：2013-09-17

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Kyung-Hyun Park ,  Nam-Je Kim ,  Hyun-Sung Ko ,  Dong-Hun Lee ,  Sang-Pil Han ,  Han-Cheol Ryu ,  Jeong-Woo Park ,  Ki-Won Moon ,  Dae-Yong Kim

IPC: H01L21/00 ,  G02F1/35 ,  H01L31/0216 ,  H01L31/0304 ,  H01L31/14 ,  H01L31/18

CPC classification number: G02F1/353 ,  G02F2203/13 ,  H01L31/02161 ,  H01L31/03046 ,  H01L31/14 ,  H01L31/1844

Abstract: Disclosed herein is a photomixer and method of manufacturing the photomixer which can fundamentally solve the existing restrictive factors of a PCA and a photomixer which are core parts of a conventional broadband terahertz spectroscopy system. The presented photomixer includes an active layer formed on a top surface of a substrate, the active layer being formed on an area on which light is incident, and a thermal conductive layer formed on the top surface of the substrate, the thermal conductive layer being formed on an area other than the area on which light is incident. The active layer is formed to have a mesa cross section, and the thermal conductive layer is regrown on an area other than the area on which light is incident using an MOCVD method, and has a flattened surface.

公开(公告)号：US20150277208A1

公开(公告)日：2015-10-01

申请号：US14430182

申请日：2013-09-17

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Kyung-Hyun Park ,  Nam-Je Kim ,  Hyun-Sung Ko ,  Dong-Hun Lee ,  Sang-Pil Han ,  Han-Cheol Ryu ,  Jeong-Woo Park ,  Ki-Won Moon ,  Dae-Yong Kim

IPC: G02F1/35 ,  H01L31/0216 ,  H01L31/0304 ,  H01L31/18 ,  H01L31/14

CPC classification number: G02F1/353 ,  G02F2203/13 ,  H01L31/02161 ,  H01L31/03046 ,  H01L31/14 ,  H01L31/1844

Abstract: Disclosed herein is a photomixer and method of manufacturing the photomixer which can fundamentally solve the existing restrictive factors of a PCA and a photomixer which are core parts of a conventional broadband terahertz spectroscopy system. The presented photomixer includes an active layer formed on a top surface of a substrate, the active layer being formed on an area on which light is incident, and a thermal conductive layer formed on the top surface of the substrate, the thermal conductive layer being formed on an area other than the area on which light is incident. The active layer is formed to have a mesa cross section, and the thermal conductive layer is regrown on an area other than the area on which light is incident using an MOCVD method, and has a flattened surface.

Abstract translation: 本文公开了一种混合器和制造光混合器的方法，其可以从根本上解决作为常规宽带太赫兹光谱系统的核心部分的PCA和光混合器的现有限制因素。 所提供的光混色器包括形成在基板的顶表面上的有源层，所述有源层形成在光入射的区域上，以及形成在所述基板的顶表面上的导热层，所述导热层被形成 在光线入射区域以外的区域。 有源层形成为具有台面横截面，并且使用MOCVD方法将导热层再生长在除了入射光的区域之外的区域上，并且具有扁平表面。