公开(公告)号：US11543359B2

公开(公告)日：2023-01-03

申请号：US17248173

申请日：2021-01-12

申请人： DEXERIALS CORPORATION

发明人： Tetsuya Murayama

IPC分类号： G01N21/59 ,  G01N21/84 ,  C23C14/54 ,  H01J37/34 ,  G01N21/49

摘要： Provided is a measuring apparatus, comprising a measuring unit that irradiates a film with light and measures the light transmitted through the film or the light reflected by the film, a moving mechanism that allows the measuring unit to move in a first direction intersecting the direction in which the film is conveyed, the measuring unit includes a light projecting unit that irradiates the film with light, an integrating sphere that collects light from the film, and a light receiving portion that receives the light collected by the integrating sphere.

公开(公告)号：US20210247322A1

公开(公告)日：2021-08-12

申请号：US17248173

申请日：2021-01-12

申请人： DEXERIALS CORPORATION

发明人： Tetsuya Murayama

IPC分类号： G01N21/84 ,  G01N21/59 ,  G01N21/49 ,  C23C14/54 ,  H01J37/34

摘要： Provided is a measuring apparatus, comprising a measuring unit that irradiates a film with light and measures the light transmitted through the film or the light reflected by the film, a moving mechanism that allows the measuring unit to move in a first direction intersecting the direction in which the film is conveyed, the measuring unit includes a light projecting unit that irradiates the film with light, an integrating sphere that collects light from the film, and a light receiving portion that receives the light collected by the integrating sphere.