公开(公告)号：US10854421B2

公开(公告)日：2020-12-01

申请号：US16429315

申请日：2019-06-03

申请人： Carl Zeiss Microscopy GmbH ,  Carl Zeiss Microscopy Ltd.

发明人： Daniela Donhauser ,  Christian Mueller ,  Barry Chamley ,  Tobias Volkenandt ,  Dirk Preikszas ,  Giuseppe Pavia ,  Heiko Stegmann

IPC分类号： H01J37/304 ,  H01J37/08 ,  H01J37/317

摘要： A charged particle beam system includes a charged particle source, an extraction electrode, a suppressor electrode, a first variable voltage supply for biasing the extraction electrode with an extraction voltage and a second variable voltage supply for biasing the suppressor electrode with a suppressor voltage.

公开(公告)号：US11935723B2

公开(公告)日：2024-03-19

申请号：US17522087

申请日：2021-11-09

申请人： Carl Zeiss Microscopy GmbH

发明人： Fabian Perez Willard ,  Tobias Volkenandt

IPC分类号： H01J37/31 ,  H01J37/08

CPC分类号： H01J37/31 ,  H01J37/08 ,  H01J2237/2801 ,  H01J2237/31749

摘要： A method prepares a microsample from a volume sample using multiple particle beams. The method includes providing a volume sample in the microscope system, wherein the interior of the volume sample has a sample region of interest, and producing a macrolamella comprising the sample region of interest by removing sample material of the volume sample using one of the particle beams. The method also includes orienting the macrolamella relative to one of the particle beams, and removing sample material of the macrolamella via a beam so that the region of interest is exposed.

公开(公告)号：US20220157560A1

公开(公告)日：2022-05-19

申请号：US17522087

申请日：2021-11-09

申请人： Carl Zeiss Microscopy GmbH

发明人： Fabian Perez Willard ,  Tobias Volkenandt

IPC分类号： H01J37/31 ,  H01J37/08

摘要： A method prepares a microsample from a volume sample using multiple particle beams. The method includes providing a volume sample in the microscope system, wherein the interior of the volume sample has a sample region of interest, and producing a macrolamella comprising the sample region of interest by removing sample material of the volume sample using one of the particle beams. The method also includes orienting the macrolamella relative to one of the particle beams, and removing sample material of the macrolamella via a beam so that the region of interest is exposed.

公开(公告)号：US20240234086A1

公开(公告)日：2024-07-11

申请号：US18433141

申请日：2024-02-05

申请人： Carl Zeiss Microscopy GmbH

发明人： Fabian Perez Willard ,  Tobias Volkenandt

IPC分类号： H01J37/31 ,  H01J37/08

CPC分类号： H01J37/31 ,  H01J37/08 ,  H01J2237/2801 ,  H01J2237/31749

摘要： A method prepares a microsample from a volume sample using multiple particle beams. The method includes providing a volume sample in the microscope system, wherein the interior of the volume sample has a sample region of interest, and producing a macrolamella comprising the sample region of interest by removing sample material of the volume sample using one of the particle beams. The method also includes orienting the macrolamella relative to one of the particle beams, and removing sample material of the macrolamella via a beam so that the region of interest is exposed.

公开(公告)号：US20190304743A1

公开(公告)日：2019-10-03

申请号：US16429315

申请日：2019-06-03

申请人： Carl Zeiss Microscopy GmbH ,  Carl Zeiss Microscopy Ltd.

发明人： Daniela Donhauser ,  Christian Mueller ,  Barry Chamley ,  Tobias Volkenandt ,  Dirk Preikszas ,  Giuseppe Pavia ,  Heiko Stegmann

IPC分类号： H01J37/304 ,  H01J37/08

摘要： A charged particle beam system includes a charged particle source, an extraction electrode, a suppressor electrode, a first variable voltage supply for biasing the extraction electrode with an extraction voltage and a second variable voltage supply for biasing the suppressor electrode with a suppressor voltage.