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公开(公告)号:US11264507B2
公开(公告)日:2022-03-01
申请号:US16078160
申请日:2017-12-12
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor: Xiaolong He , Dongsheng Li , Shengguang Ban , Rui Huang , Dongcan Mi
IPC: H01L29/786 , H01L29/267 , H01L29/45 , H01L29/66 , H01L21/4763 , H01L27/12
Abstract: A thin film transistor and a method for manufacturing the same, an array substrate and an electronic device. The thin film transistor includes a gate, a gate insulator, an active layer, a source and a drain. A protective structure is disposed on a side of the source and the drain close to the gate.
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公开(公告)号:US10217851B2
公开(公告)日:2019-02-26
申请号:US15707827
申请日:2017-09-18
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor: Jing Niu , Shuang Sun , Fangzhen Zhang , Dongcan Mi
IPC: H01L29/66 , H01L21/443 , H01L21/4763 , H01L29/786 , H01L27/12
Abstract: Embodiments of the disclosure provide an array substrate and a manufacturing method thereof, and a display device. The method includes: forming a semiconductor material film, a first insulation material film and a first conductive material film successively on a base substrate, and processing these films through a single patterning process to form an active pattern, a gate insulation pattern and a gate electrode; forming a second insulation layer and forming two contact holes in the second insulation layer and gate insulation pattern; forming a second conductive material film and forming two contact structures from portions of this layer; and forming a third conductive material film, and processing this layer through a single patterning process to form a pixel electrode, and source and drain electrodes being in direct contact with the two contact structures respectively, the pixel electrode and one contact structure being integrated into one piece.
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公开(公告)号:US20180122924A1
公开(公告)日:2018-05-03
申请号:US15707827
申请日:2017-09-18
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor: Jing Niu , Shuang Sun , Fangzhen Zhang , Dongcan Mi
IPC: H01L29/66 , H01L27/12 , H01L29/786 , H01L21/443 , H01L21/4763
CPC classification number: H01L29/66969 , H01L21/443 , H01L21/47635 , H01L27/1225 , H01L27/1288 , H01L29/78618 , H01L29/7869
Abstract: Embodiments of the disclosure provide an array substrate and a manufacturing method thereof, and a display device. The method includes: forming a semiconductor material film, a first insulation material film and a first conductive material film successively on a base substrate, and processing these films through a single patterning process to form an active pattern, a gate insulation pattern and a gate electrode; forming a second insulation layer and forming two contact holes in the second insulation layer and gate insulation pattern; forming a second conductive material film and forming two contact structures from portions of this layer; and forming a third conductive material film, and processing this layer through a single patterning process to form a pixel electrode, and source and drain electrodes being in direct contact with the two contact structures respectively, the pixel electrode and one contact structure being integrated into one piece.
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