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公开(公告)号：US3337438A
公开(公告)日：1967-08-22
申请号：US31828263
申请日：1963-10-23
Applicant: BELL TELEPHONE LABOR INC
Inventor： GOBELI GARTH W , LIGENZA JOSEPH R
IPC: C23C8/12 , C23C8/36 , H01J37/32 , H01L21/316
CPC classification number: H01J37/32229 , C23C8/12 , C23C8/36 , H01J37/32192 , H01J2237/338 , H01L21/31654 , Y10S148/118
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