公开(公告)号：US20250146119A1

公开(公告)日：2025-05-08

申请号：US18939220

申请日：2024-11-06

Applicant: Applied Materials, Inc.

Inventor： Martin Lee RIKER ,  Abilash SAINATH ,  Suhas UMESH ,  Keyvan KASHEFIZADEH ,  Yunho KIM ,  Sundarapandian Ramaling Vijayalaskshmi REDDY ,  Prashanth KOTHNUR

IPC: C23C14/02 ,  C23C14/35

Abstract: In some embodiments, a physical vapor deposition apparatus includes a top flux optimizer configured to be biased. The physical vapor deposition apparatus further includes an intermediate flux optimizer configured to be biased. The top flux optimizer and the intermediate flux optimizer are separated by a first distance. The physical vapor deposition apparatus further includes a bottom flux optimizer configured to be biased. The bottom flux optimizer and the intermediate flux optimizer are separated by a second distance. The physical vapor deposition apparatus further includes a top power source coupled to the top flux optimizer, an intermediate power source coupled to the intermediate flux optimizer, and a bottom power source coupled to the bottom flux optimizer.

公开(公告)号：US20230335377A1

公开(公告)日：2023-10-19

申请号：US17721417

申请日：2022-04-15

Applicant: Applied Materials, Inc.

Inventor： Anantha K. SUBRAMANI ,  Seyyed Abdolreza FAZELI ,  Yang GUO ,  Chandrashekara BAGINAGERE ,  Ramcharan SUNDAR ,  Yunho KIM ,  Rajasekhar PATIBANDLA

IPC: H01J37/32 ,  C23C16/455 ,  C23C16/505

CPC classification number: H01J37/3244 ,  H01J37/32422 ,  H01J37/32357 ,  C23C16/45565 ,  C23C16/505 ,  H01J2237/332

Abstract: Methods and apparatus for substrate processing are described. In some embodiments a showerhead assembly includes a heated showerhead having a heater and a gas diffusion plate coupled to the heater, the gas diffusion plate having a plurality of channels extending through the gas diffusion plate; an ion filter spaced from the heated showerhead, the ion filter having a first side facing the heated showerhead and a second side opposite the first side, the ion filter having a plurality of channels extending through the ion filter; a heat transfer ring in contact between the heated showerhead and the ion filter, the heat transfer ring being thermally conductive and electrically insulative, the heat transfer ring comprised of a plurality of elements spaced from one another along an interface between the heated showerhead and the ion filter; and a remote plasma region defined between the heated showerhead and the ion filter.