公开(公告)号：US20240297066A1

公开(公告)日：2024-09-05

申请号：US18116244

申请日：2023-03-01

Applicant: Applied Materials, Inc.

Inventor： Liurui LI ,  Songjae LEE

IPC: H01L21/687 ,  B65G47/90

CPC classification number: H01L21/6875 ,  B65G47/90 ,  H01L21/68707

Abstract: A method for securing a support ball in a substrate support, a tool for forming a capture lip in a substrate support, and a substrate support having a substrate support ball captured in an opening of the substrate support are provided. In one example, a method for securing a support ball in a substrate support includes pressing a support ball into an opening formed in a first surface of the substrate support which is configured to support a substrate in a vacuum processing chamber, forming a capture lip in the opening which protrudes into the opening a distance sufficient to retain the support ball in the opening support ball, and setting an exposure height that the support ball projects above the first surface the substrate support.