公开(公告)号：US20170352569A1

公开(公告)日：2017-12-07

申请号：US15612054

申请日：2017-06-02

Applicant: Applied Materials, Inc.

Inventor： Abdul Aziz KHAJA ,  Xing LIN ,  Edward P. HAMMOND, IV ,  Juan Carlos ROCHA-ALVAREZ ,  Chidambara A. RAMALINGAM ,  Ganesh BALASUBRAMANIAN ,  Ren-Guan DUAN ,  Jianhua ZHOU ,  Jonathan J. STRAHLE

IPC: H01L21/683 ,  H01L21/67

CPC classification number: H01L21/6833 ,  H01L21/67103 ,  H01L21/6831

Abstract: A heated support assembly is disclosed which includes a body comprising aluminum nitride doped with magnesium oxide having a volume resistivity of about 1×1010 Ω-cm at about 600 degrees Celsius, an electrode embedded in the body, and a heater mesh embedded in the body.