公开(公告)号：US20250132146A1

公开(公告)日：2025-04-24

申请号：US18382961

申请日：2023-10-23

Applicant: Applied Materials, Inc.

Inventor： Mohammad Mahdi TAVAKOLI ,  Chandan DAS ,  Bencherki MEBARKI ,  Joung Joo LEE ,  Jiecong TANG ,  Avgerinos V. GELATOS

IPC: H01L21/02 ,  H01L21/3213

Abstract: A method of capping a metal layer includes performing a conversion process to reduce a metal oxide layer formed on a top surface of the metal layer and form a metal sulfide layer on the top surface of the metal layer, exposing the top surface of the metal layer to an oxidizing environment, and performing a removal process to remove the metal sulfide layer.