公开(公告)号：US10228626B2

公开(公告)日：2019-03-12

申请号：US15736297

申请日：2016-04-28

Applicant: ASML Netherlands B.V.

Inventor： Antonius Franciscus Johannes De Groot ,  Theo Anjes Maria Ruijl ,  Christiaan Louis Valentin ,  Christian Werner

IPC: G03F7/20 ,  G03B27/58 ,  H01L21/027 ,  H01L21/68

Abstract: A movable support configured to support an object, the support including: a support plane to support the object, an actuator assembly to move the movable support in a first direction and in a second direction perpendicular to the first direction, wherein the first direction and the second direction extend in a plane parallel to the support plane, wherein the actuator assembly includes: a first actuator configured to exert a first actuation force in a first actuation direction, the first actuation direction being parallel to the support plane, a second actuator configured to exert a second actuation force in a second actuation direction, the second actuation direction being parallel to the support plane, wherein the first actuation direction and the second actuation direction are arranged non-parallel and non-perpendicular with respect to each other.