公开(公告)号：US20250029811A1

公开(公告)日：2025-01-23

申请号：US18907436

申请日：2024-10-04

Applicant: ASML Netherlands B.V.

Inventor： Arthur Eduard OVERLACK ,  Ronald KROON ,  Richard Michel VAN LEEUWEN ,  Andre Luis RODRIGUES MANSANO ,  Herre Tjerk STEENSTRA ,  Erwin Robert Alexander VISSER

IPC: H01J37/244 ,  H01J37/28

Abstract: The embodiments of the present disclosure provide a sensor substrate for a charged particle optical device and/or a charged particle assessment apparatus, the sensor substrate comprising: at least one distance sensor configured to generate a measurement signal representative of a distance between the distance sensor and a facing surface of a target; and at least one charged particle optical component.