摘要:
A method, apparatus, system and data structure is disclosed for mapping of spatial data to linear indexing for efficient computational storage, retrieval, integration, transmission, visual display, analysis, fusion, and modeling. These inventions are based on plane space being decomposed into uniform discrete closely packed (hexagonal) cell areas (85). Each resolution of closely packed cells can be further divided into congruent but denser clusters of closely packed cells. The spatial indexing (86) is applied in such a manner as to build a relationship with the spatially close cells of any resolution.
摘要:
A method, apparatus, system and data structure is disclosed for mapping of spatial data to linear indexing for efficient computational storage, retrieval, integration, transmission, visual display, analysis, fusion, and modeling. These inventions are based on space being decomposed into uniform discrete closely packed (hexagonal) cell areas (85). Each resolution of close-packed cells can be further divided into incongruent but denser clusters of close-packed cells. The spatial indexing (86) is applied in such a manner as to build a relationship with the spatially close cells of any resolution.
摘要:
An interface seal between a gas flow line within a support surface for a pod and a flow valve mounted within the pod. The kinematic coupling between a pod and support surface aligns a pair of inlet and outlet valves on a bottom surface of the pod with a corresponding pair of inlet and outlet holes in the support surface, through which gas may be injected into and removed from the pod, respectively. The interface according to the various embodiments of the invention provides a durable seal substantially preventing leakage between the pod and support surface while at the same time being compatible with kinematic couplings. In embodiments of the invention, the seal is thin and flexible, and expands into engagement with the pod to establish the seal. This type of interface seal will not interfere with the proper seating of the pod on the kinematic pins. Moreover, in a relaxed state, embodiments of the interface seal extend only a small distance above the support surface, and have no edges that are capable of catching on the pod as the pod is loaded or removed at low angles.
摘要:
A SMIF pod capable of supporting a cassette at points in the pod located directly over or near a kinematic coupling between the pod and a surface on which the pod is supported. Even if the pod shell warps or otherwise deforms, the three points of contact between the pod and the support surface at the kinematic couplings will always remain at a fixed, controllable and repeatable position. The present invention makes use of this fact by supporting the cassette at or near the three kinematic coupling points. Moreover, the support structure is not affixed to the top or sides of the pod shell. Thus, the position of the cassette, and wafers supported therein, will similarly remain at a fixed, controllable and repeatable position, substantially unaffected by any pod shell deformation which may occur.
摘要:
A method, apparatus, system and data structure is disclosed for mapping of spatial data to linear indexing for efficient computational storage, retrieval, integration, transmission, visual display, analysis, fusion, and modeling. These inventions are based on space being decomposed into uniform discrete closely packed (hexagonal) cell areas (85). Each resolution of close-packed cells can be further divided into incongruent but denser clusters of close-packed cells. The spatial indexing (86) is applied in such a manner as to build a relationship with the spatially close cells of any resolution.
摘要:
A method, apparatus, system and data structure is disclosed for mapping of spatial data to linear indexing for efficient computational storage, retrieval, integration, transmission, visual display, analysis, fusion, and modeling. These inventions are based on plane space being decomposed into uniform discrete closely packed (hexagonal) cell areas (85). Each resolution of closely packed cells can be further divided into incongruent but denser clusters of closely packed cells. The spatial indexing (86) is applied in such a manner as to build a relationship with the spatially close cells of any resolution.