发明授权
- 专利标题: Kinematic coupling compatible passive interface seal
- 专利标题(中): 运动耦合兼容无源接口密封
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申请号: US49330申请日: 1998-03-27
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公开(公告)号: US6164664A公开(公告)日: 2000-12-26
- 发明人: William J. Fosnight , Joshua W. Shenk , Perry Peterson
- 申请人: William J. Fosnight , Joshua W. Shenk , Perry Peterson
- 申请人地址: CA Fremont
- 专利权人: Asyst Technologies, Inc.
- 当前专利权人: Asyst Technologies, Inc.
- 当前专利权人地址: CA Fremont
- 主分类号: F16J15/02
- IPC分类号: F16J15/02 ; F16J15/48
摘要:
An interface seal between a gas flow line within a support surface for a pod and a flow valve mounted within the pod. The kinematic coupling between a pod and support surface aligns a pair of inlet and outlet valves on a bottom surface of the pod with a corresponding pair of inlet and outlet holes in the support surface, through which gas may be injected into and removed from the pod, respectively. The interface according to the various embodiments of the invention provides a durable seal substantially preventing leakage between the pod and support surface while at the same time being compatible with kinematic couplings. In embodiments of the invention, the seal is thin and flexible, and expands into engagement with the pod to establish the seal. This type of interface seal will not interfere with the proper seating of the pod on the kinematic pins. Moreover, in a relaxed state, embodiments of the interface seal extend only a small distance above the support surface, and have no edges that are capable of catching on the pod as the pod is loaded or removed at low angles.
公开/授权文献
- USD379001S Cover for horn 公开/授权日:1997-04-29
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