公开(公告)号：US6086323A

公开(公告)日：2000-07-11

申请号：US343110

申请日：1999-06-29

申请人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

发明人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

IPC分类号： B65G49/07 ,  H01L21/677 ,  H01L21/687

CPC分类号： H01L21/67775 ,  H01L21/68707 ,  Y10S414/14

摘要： A method for unloading silicon wafers contained in a cassette from a sealed pod and supplying the wafers to an IC manufacturing process. The method includes receiving a base of the pod onto a loading platform of a pod loader interface and then unlocking the pod cover from the base. While maintaining the wafers in a clean mini-environment, the method raises the pod cover away from the base, contacts the now exposed cassette with an end effector of an articulated arm, secures the cassette to the end effector, and activates the arm to transport the wafers out of mini-environment for supplying the wafers to an IC manufacturing process. Preferably, the method further includes raising the articulated arm to lift the cassette before transferring the wafers to the process. Even more preferred, the method directs a flow of clean air within the mini-environment horizontally past the wafers.

摘要翻译： 一种用于从密封容器卸载包含在盒中的硅晶片并将晶片供应到IC制造工艺的方法。 该方法包括将荚的基部接收到荚果装载器界面的装载平台上，然后从荚底部解除荚盖。 在将晶片保持在干净的迷你环境中的同时，该方法使荚盖远离基座，将其与接合臂的末端执行器接触现在暴露的盒，将盒固定到端部执行器上，并且使臂移动 用于将晶片供应到IC制造工艺的微型环境中的晶片。 优选地，该方法还包括在将晶片转移到该过程之前提升铰接臂以抬起盒。 甚至更优选地，该方法引导微环境内的清洁空气流动水平地流过晶片。

公开(公告)号：US06592317B1

公开(公告)日：2003-07-15

申请号：US09593245

申请日：2000-06-13

申请人： John M. Rush ,  Torben Ulander

发明人： John M. Rush ,  Torben Ulander

IPC分类号： B65G1133

CPC分类号： H01L21/68707

摘要： An end effector for a pod loader interface includes a gripper plate that attaches to the articulated arm. A pair of gripper blades are separated from each other along and are coupled to the gripper plate. During gripping of a wafer carrier, the gripper blades initially close toward each other and then draw nearer to the gripper plate. Nested outer and inner U-shaped yokes, which may attach the gripper plate to the articulated arm, are joined by rotational joints to permit their relative rotation for reorienting the wafer carrier. Yet other aspect of the present invention are a mechanical forearm drive that provides substantially linear motion of an articulated arm's wrist joint, and an end effector rotary-drive included in a forearm of the articulated arm.

摘要翻译： 用于荚果装载器接口的端部执行器包括附接到铰接臂的夹持板。 一对夹持器叶片彼此分离并且联接到夹持板。 夹持晶片载体时，夹持器叶片最初朝向彼此靠近，然后更靠近夹板。 可以将夹持板附接到铰接臂的嵌套外U形轭和内U形轭通过旋转接头连接，以允许它们相对旋转以重新定向晶片载体。 本发明的另一方面是提供关节臂的腕关节的基本线性运动的机械前臂驱动器，以及包括在铰接臂的前臂中的末端执行器旋转驱动器。

公开(公告)号：US06494666B2

公开(公告)日：2002-12-17

申请号：US09771159

申请日：2001-01-26

申请人： Kung Chris Wu ,  John M. Rush ,  Torben Ulander

发明人： Kung Chris Wu ,  John M. Rush ,  Torben Ulander

IPC分类号： B66C2300

CPC分类号： B25J18/04 ,  B25J9/042 ,  B25J19/0079 ,  H01L21/67739

摘要： A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over. The arm includes a support column having an open column assembly that projects above a base. Within the assembly, a Z-axis drive energizes extension and retraction of a hollow tube carried by the support column. A shaft, rotatable about the Z-axis and having a distal end furthest from the support column's base, receives an arm assembly. An arm-assembly rotary-drive energizes the shaft's rotation. An arm base-plate, secured to the shaft's distal end, supports the arm assembly therefrom. The arm base-plate carries a wrist joint that is displaced from the Z-axis, and receives the end-effector whose rotation about a wrist-joint axis is energized by an end-effector rotary-drive.

摘要翻译： 适于运输半导体晶片的三自由度SCARA臂包括在臂的远端接头处的端部执行器组件。 在一种配置中，末端执行器将工件翻转过来。 臂包括具有突出在基部之上的开放柱组件的支撑柱。 在组件内，Z轴驱动器对由支撑柱承载的中空管的延伸和缩回起动作用。 绕Z轴可旋转并且具有远离支撑柱底部的远端的轴接收臂组件。 手臂组件旋转驱动器激励轴的旋转。 固定到轴的远端的臂基板从其支撑臂组件。 臂基板带有从Z轴移位的腕关节，并且接收通过末端执行器旋转驱动来使围绕腕关节轴旋转的末端执行器。

公开(公告)号：US5934991A

公开(公告)日：1999-08-10

申请号：US21494

申请日：1998-02-01

申请人： John M. Rush

发明人： John M. Rush

IPC分类号： H01L21/00 ,  H01L21/677 ,  B01L1/04

CPC分类号： H01L21/67028 ,  H01L21/67775

摘要： A fan is attached directly adjacent to a clean air filter sealing an air inlet under a horizontal portion of a plenum chamber below a vertically movable loading platform which all move as a unit. A vertical portion of the plenum chamber, trapezoidal in cross-section, communicates with a wafer pod on the loading platform through an angled perforated grill sealing an air outlet from the vertical portion of the plenum chamber. Clean air flows evenly throughout the entire height of an angled perforated grill over the surfaces of the wafers. Mechanisms lift the pod cover and load and unload the wafer carrier.

摘要翻译： 风扇直接连接到清洁空气过滤器的旁边，将清洁空气过滤器密封在一个可移动作为一个单元的垂直移动的装载平台下面的增压室的水平部分的空气入口。 增压室的垂直部分，横截面梯形，通过角形的穿孔格栅与加载平台上的晶片盒连通，从而从充气室的垂直部分密封空气出口。 清洁的空气在晶片表面上的整个高度均匀地流动。 机构提升荚盖，装载和卸载晶片载体。

公开(公告)号：US5885045A

公开(公告)日：1999-03-23

申请号：US38809

申请日：1998-03-11

申请人： John M. Rush

发明人： John M. Rush

IPC分类号： B65G49/00 ,  B65G49/07 ,  H01L21/677 ,  B65G65/00

CPC分类号： H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/138 ,  Y10S414/14

摘要： A system includes an interface for receiving a pod having a carrier that receives wafers, and that is initially enclosed within a base and a pod cover. The system also includes a mechanism that transfers an exposed carrier between the interface and a platform of a mass-transfer machine included in the system. The machine includes a gantry arm for transferring the carrier between the platform and a transfer station. A retainer assembly is positionable over the carrier at the transfer station, and over a process carrier that is used in a processing tool. Moveable retainers of the assembly receive and hold wafers. The machine includes an elevator that moves between the transfer station and the process carrier. The elevator extends and retracts for transferring wafers between the retainers and either the carrier or the process carrier. A turntable, that receives the process carrier, permits automatically reorienting wafers.

摘要翻译： 系统包括用于接收具有接收晶片的载体并且最初封装在基座和荚盖内的荚的接口。 该系统还包括一个机构，该机构在接口和包括在系统中的传质机的平台之间传送暴露的载体。 该机器包括用于在平台和转运站之间传送托架的龙门臂。 保持器组件可在转运站处的载体上方定位，并且在用于加工工具的过程载体上。 组件的可移动保持器接收和保持晶片。 该机器包括在传送站和处理载体之间移动的电梯。 升降机延伸和缩回以在保持器和载体或过程载体之间传送晶片。 接收过程载体的转盘允许自动重新定向晶片。

公开(公告)号：US5506744A

公开(公告)日：1996-04-09

申请号：US234842

申请日：1994-04-28

申请人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

发明人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

IPC分类号： H05F3/04 ,  H05F3/06 ,  H05F3/00

CPC分类号： H05F3/06 ,  H05F3/04

摘要： An ionized airflow manifold for static reduction. The manifold may be installed in a stand-alone frame, or attached to any processing machine. The manifold includes a commercially available gas ionizer that provides an ionized air supply, and creates an air curtain around a target area.

摘要翻译： 用于静电还原的电离气流歧管。 歧管可以安装在独立的框架中，或者连接到任何加工机器上。 歧管包括市售的气体离子发生器，其提供电离空气供应，并在目标区域周围产生气帘。

公开(公告)号：US5193969A

公开(公告)日：1993-03-16

申请号：US703011

申请日：1991-05-20

申请人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

发明人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67781 ,  Y10S414/138

摘要： The present invention is a rotary, 3-stage wafer transfer machine. The transfer machine utilizes a pneumatically powered lift mechanism to raise wafers from a boat to a retaining area. If the next operation for the wafer is a single density operation (twenty-five wafers per boat), the wafers are the simply transferred to another boat for further processing. If the next operation for the wafers requires double density (fifty wafers per boat), a second set of wafers is lifted to the retaining area, where they are interspersed with the first set to create a double density set of fifth wafers. This set is then transferred to the appropriate boat (generally a quartz boat) for further processing. All components that could generate particulate contamination are sealed off from the transfer area. Extra duty materials are used for the components of the machine to provide unique reproducibility and eliminate much of the required maintenance as compared to the prior art. Lack of contamination and superior reproducibility allow increased yield in the manufacturing process.

摘要翻译： 本发明是旋转式3级晶片转印机。 转移机器利用气动提升机构将晶片从船上提升到保持区域。 如果晶片的下一个操作是单一密度操作（每个船只二十五个晶片），则晶片被简单地转移到另一个船上用于进一步处理。 如果晶片的下一次操作需要双重密度（每个船只五十个晶片），则第二组晶片被提升到保持区域，在那里它们与第一组散布，以产生双倍密度的第五晶片组。 然后将该组转移到适当的船（通常是石英舟）以进一步处理。 所有可能产生颗粒污染物的组分都与传输区域密封。 与现有技术相比，额外的功能材料用于机器的部件以提供独特的再现性并且消除了大量所需的维护。 缺乏污染和卓越的再现性，可以提高生产过程中的产量。

公开(公告)号：US06193459B1

公开(公告)日：2001-02-27

申请号：US09267432

申请日：1999-03-12

申请人： John M. Rush

发明人： John M. Rush

IPC分类号： B65G6500

CPC分类号： H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/138 ,  Y10S414/14

摘要： A system includes an interface for receiving a pod having a carrier that receives wafers, and that is initially enclosed within a base and a pod cover. The system also includes a mechanism that transfers an exposed carrier between the interface and a platform of a mass-transfer machine included in the system. The machine includes a gantry arm for transferring the carrier between the platform and a transfer station. A retainer assembly is positionable over the carrier at the transfer station, and over a process carrier that is used in a processing tool. Moveable retainers of the assembly receive and hold wafers. The machine includes an elevator that moves between the transfer station and the process carrier. The elevator extends and retracts for transferring wafers between the retainers and either the carrier or the process carrier. A turntable, that receives the process carrier, permits automatically reorienting wafers.

摘要翻译： 系统包括用于接收具有接收晶片的载体并且最初封装在基座和荚盖内的荚的接口。 该系统还包括一个机构，该机构在接口和包括在系统中的传质机的平台之间传送暴露的载体。 该机器包括用于在平台和转运站之间传送托架的龙门臂。 保持器组件可在转运站处的载体上方定位，并且在用于加工工具的过程载体上。 组件的可移动保持器接收和保持晶片。 该机器包括在传送站和处理载体之间移动的电梯。 升降机延伸和缩回以在保持器和载体或过程载体之间传送晶片。 接收过程载体的转盘允许自动重新定向晶片。

公开(公告)号：US5984610A

公开(公告)日：1999-11-16

申请号：US400039

申请日：1995-03-07

申请人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

发明人： John M. Rush ,  Torben Ulander ,  Michael T. Verdon

IPC分类号： B65G49/07 ,  H01L21/677 ,  H01L21/687

CPC分类号： H01L21/67775 ,  H01L21/68707 ,  Y10S414/14

摘要： The pod loader interface is a machine that is able to automatically open a SMIF pod and unload the contents thereof. An elevator raises the SMIF cover away from its base to reveal the wafer boat contained in the SMIF pod. An articulated arm thereafter reaches through an opening in a bulkhead of the machine, securing the wafer cassette and withdrawing it through the hole in the bulkhead. The wafer cassette is then placed in position to be operated upon by the next step in the manufacturing process. The machine includes an integrated clean air system to provide a clean environment for the wafers.

摘要翻译： pod加载器接口是能够自动打开SMIF pod并卸载其内容的机器。 电梯将SMIF盖板从基座上抬起，以露出包含在SMIF吊舱中的晶片舟皿。 然后，铰接臂通过机器的隔板中的开口到达，固定晶片盒并将其取出通过隔板中的孔。 然后将晶片盒放置在制造过程中通过下一步操作的位置。 该机器包括集成的清洁空气系统，为晶片提供清洁的环境。

公开(公告)号：US5870488A

公开(公告)日：1999-02-09

申请号：US646434

申请日：1996-05-07

申请人： John M. Rush ,  J. Randolph Andrews ,  Richard Collins ,  Conor Patrick O'Carroll ,  David Ou

发明人： John M. Rush ,  J. Randolph Andrews ,  Richard Collins ,  Conor Patrick O'Carroll ,  David Ou

IPC分类号： H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  G06K9/00 ,  G06F19/00 ,  G06K9/36

CPC分类号： H01L21/67271 ,  H01L21/67778 ,  H01L21/681

摘要： A wafer sorting system utilizing optical character recognition and optical "gate sensors" to determine the orientation of the wafers for prealigning. It is envisioned that the machine will be installed in conjunction with a computer controller and multiple cassette stations. A first end of a transfer arm of a robot is equipped with an end effector to transfer individual wafers. The end effector of the transfer arm is extendable and retractable to select and remove the desired wafer from its cassette, and to transfer it to the prealigner or a target cassette in its proper orientation. The end effector includes a vacuum pickup and a sensor that enables detection of presence or absence of wafers in the cassette, and any misaligned wafers in the cassette. Further gate sensors are mounted on the prealigner to accomplish the orientation function prior to the wafer being placed on the prealigner chuck. Multiple perimeter points are used to determine the position of the center of the wafer. The optical character recognition capability of the system then allows the individual wafers to be identified and to be sorted as desired.

摘要翻译： 使用光学字符识别的晶片分选系统和光学“门传感器”来确定用于预对准的晶片的取向。 可以设想，该机器将与计算机控制器和多个盒式磁带站一起安装。 机器人的传送臂的第一端装备有用于传送单个晶片的末端执行器。 传送臂的末端执行器是可伸缩的以从其盒中选择和移除所需的晶片，并将其转移到其正确取向的预对准器或目标盒中。 末端执行器包括真空拾取器和能够检测盒中存在或不存在晶片的传感器，以及盒中任何未对准的晶片。 在将晶片放置在预定位器卡盘上之前，其它门传感器安装在预对准器上以实现取向功能。 多个周界点用于确定晶片中心的位置。 然后，系统的光学字符识别能力允许识别各个晶片并根据需要进行分类。