公开(公告)号：US4992742A

公开(公告)日：1991-02-12

申请号：US436664

申请日：1989-11-15

Applicant: Soichiro Okuda ,  Shigeo Sasaki ,  Kazuo Yoshida ,  Yoshio Yamane ,  Fumiharu Yabunaka

Inventor： Soichiro Okuda ,  Shigeo Sasaki ,  Kazuo Yoshida ,  Yoshio Yamane ,  Fumiharu Yabunaka

IPC: G01T1/29

CPC classification number: G01T1/29

Abstract: A charged-particle distribution measuring apparatus includes a particle passing member having a plurality of through-holes through which portions of a beam of charged particles can pass, a particle trapping member for trapping charged particles that have passed through the through-holes, a recoil particle trapping member disposed between the particle passing member and the particle trapping member, and a mechanism for moving the members to measure the spatial distribution of the charged particle beam. Preferably, the through-holes in the particle passing member are uniformly distributed in a checkerboard pattern. The movement of the members permits measurement of the currents produced by the charged particle beam at various intervals between the locations of the through-holes at the beginning of the measurement. The measurement of the charged particle beam intensity at positions across through the beam, rather than at fixed locations within the beam, improves the resolution of the measured distribution. The apparatus can be employed with positively and negatively charged beams and is useful in ion implantation.

Abstract translation: 带电粒子分布测量装置包括具有多个通孔的粒子通过部件，带电粒子束的一部分可以通过该通孔，用于捕获穿过通孔的带电粒子的粒子俘获部件，反冲 设置在颗粒通过构件和颗粒捕获构件之间的颗粒捕获构件，以及用于移动构件以测量带电粒子束的空间分布的机构。 优选地，颗粒通过构件中的通孔以棋盘图案均匀分布。 构件的运动允许在测量开始时在通孔的位置之间以各种间隔测量由带电粒子束产生的电流。 通过光束而不是在光束内的固定位置处的位置处的带电粒子束强度的测量提高了测量分布的分辨率。 该装置可以采用带正电荷和带负电荷的束，并且可用于离子注入。

公开(公告)号：US08061412B2

公开(公告)日：2011-11-22

申请号：US11520693

申请日：2006-09-14

Applicant: Shigetoshi Ippoushi ,  Akira Yamada ,  Hirotoshi Maekawa ,  Fumiharu Yabunaka

Inventor： Shigetoshi Ippoushi ,  Akira Yamada ,  Hirotoshi Maekawa ,  Fumiharu Yabunaka

IPC: F28F7/00 ,  H05K7/20

CPC classification number: H05K7/20272 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A cooling structure includes a heat dissipation structure having a heat generator and a heatsink that is adhered through an insulating adhesive layer to at least a surface of the heat generator that faces a cooling fluid and made of a metal foil having the flexibility; and a fluid flow path that is disposed outside of the heat dissipation structure so that the cooling fluid flowing inside thereof and the heatsink may directly come into contact. Furthermore, on a surface of the heatsink that directly comes into contact with the cooling fluid, a fine recess is disposed.

Abstract translation: 冷却结构包括具有热发生器和散热器的散热结构，所述散热结构通过绝缘粘合剂层粘附到所述发热体的至少面向冷却流体并由具有柔性的金属箔制成的表面; 以及设置在散热结构的外侧的流体流动路径，使得在其内部流动的冷却流体和散热器可以直接接触。 此外，在与冷却流体直接接触的散热器的表面上，设置有细小凹部。

公开(公告)号：US20120024513A1

公开(公告)日：2012-02-02

申请号：US13269051

申请日：2011-10-07

Applicant: Shigetoshi IPPOUSHI ,  Akira YAMADA ,  Hirotoshi MAEKAWA ,  Fumiharu YABUNAKA

Inventor： Shigetoshi IPPOUSHI ,  Akira YAMADA ,  Hirotoshi MAEKAWA ,  Fumiharu YABUNAKA

IPC: F28F7/00

CPC classification number: H05K7/20272 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A cooling structure includes a heat dissipation structure having a heat generator and a heatsink that is adhered through an insulating adhesive layer to at least a surface of the heat generator that faces a cooling fluid and made of a metal foil having the flexibility. A fluid flow path is disposed outside of the heat dissipation structure so that the cooling fluid flowing inside thereof and the heatsink may directly come into contact. Further, a fine recess is disposed on a surface of the heatsink that directly comes into contact with the cooling fluid.

Abstract translation: 冷却结构包括具有热发生器和散热器的散热结构，所述散热器通过绝缘粘合剂层粘附到至少面向冷却流体并由具有柔性的金属箔制成的发热体的表面。 流体流动路径设置在散热结构的外部，使得在其内部流动的冷却流体和散热器可以直接接触。 此外，在与冷却流体直接接触的散热器的表面上设置有细小的凹部。

公开(公告)号：US07907408B2

公开(公告)日：2011-03-15

申请号：US12293282

申请日：2007-04-12

Applicant: Shigetoshi Ippoushi ,  Tetsuya Takahashi ,  Kazuyoshi Toya ,  Fumiharu Yabunaka ,  Kunihiko Kaga

Inventor： Shigetoshi Ippoushi ,  Tetsuya Takahashi ,  Kazuyoshi Toya ,  Fumiharu Yabunaka ,  Kunihiko Kaga

IPC: H05K7/20 ,  F28D15/00

CPC classification number: F25B39/02 ,  F28D15/0266 ,  H01L23/427 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A cooling apparatus with high strength and good heat radiation characteristics. In the cooling apparatus, a heat exchanger is joined to an evaporator disposed on the lower side in a face to face manner; a containing unit of the heat exchanger includes a heat exchanger high temperature liquid outlet, and a two-phase fluid inlet in a joint portion with the evaporator; an outlet header of the heat exchanger includes an intermediate liquid outlet at a joint portion with the evaporator; and the evaporator includes a two-phase fluid outlet in the joint portion with the heat exchanger in opposition to the two-phase fluid inlet of the containing unit, and including an intermediate liquid inlet at the joint portion with the heat exchanger in opposition to the intermediate liquid outlet of the outlet header.

Abstract translation: 具有高强度和良好散热特性的冷却装置。 在冷却装置中，热交换器以面对面的方式接合到设置在下侧的蒸发器; 热交换器的容纳单元包括热交换器高温液体出口和与蒸发器的接合部分中的两相流体入口; 热交换器的出口集管包括在与蒸发器的接合部分处的中间液体出口; 并且所述蒸发器包括与所述热交换器的所述接合部分中的与所述容纳单元的两相流体入口相对的两相流体出口，并且在与所述热交换器的接合部分处包括中间液体入口 出口集管的中间液体出口。

公开(公告)号：US20100232110A1

公开(公告)日：2010-09-16

申请号：US12293282

申请日：2007-04-12

Applicant: Shigetoshi Ippoushi ,  Tetsuya Takahashi ,  Kazuyoshi Toya ,  Fumiharu Yabunaka ,  Kunihiko Kaga

Inventor： Shigetoshi Ippoushi ,  Tetsuya Takahashi ,  Kazuyoshi Toya ,  Fumiharu Yabunaka ,  Kunihiko Kaga

IPC: H05K7/20 ,  F24H1/10 ,  F28F13/00 ,  F28F9/02

CPC classification number: F25B39/02 ,  F28D15/0266 ,  H01L23/427 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A cooling apparatus with high strength and good heat radiation characteristics. In the cooling apparatus, a heat exchanger is joined to an evaporator disposed on the lower side in a face to face manner; a containing unit of the heat exchanger includes a heat exchanger high temperature liquid outlet, and a two-phase fluid inlet in a joint portion with the evaporator; an outlet header of the heat exchanger includes an intermediate liquid outlet at a joint portion with the evaporator; and the evaporator includes a two-phase fluid outlet in the joint portion with the heat exchanger in opposition to the two-phase fluid inlet of the containing unit, and including an intermediate liquid inlet at the joint portion with the heat exchanger in opposition to the intermediate liquid outlet of the outlet header.

Abstract translation: 具有高强度和良好散热特性的冷却装置。 在冷却装置中，热交换器以面对面的方式接合到设置在下侧的蒸发器; 热交换器的容纳单元包括热交换器高温液体出口和与蒸发器的接合部分中的两相流体入口; 热交换器的出口集管包括在与蒸发器的接合部分处的中间液体出口; 并且所述蒸发器包括与所述热交换器的所述接合部分中的与所述容纳单元的两相流体入口相对的两相流体出口，并且在与所述热交换器的接合部分处包括中间液体入口 出口集管的中间液体出口。

公开(公告)号：US20070062674A1

公开(公告)日：2007-03-22

申请号：US11520693

申请日：2006-09-14

Applicant: Shigetoshi Ippoushi ,  Akira Yamada ,  Hirotoshi Maekawa ,  Fumiharu Yabunaka

Inventor： Shigetoshi Ippoushi ,  Akira Yamada ,  Hirotoshi Maekawa ,  Fumiharu Yabunaka

IPC: H05K7/20

CPC classification number: H05K7/20272 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A cooling structure includes a heat dissipation structure 20 having a heat generator 8 and a heatsink 7 that is adhered through an insulating adhesive layer 6 to at least a surface of the heat generator 8 that faces a cooling fluid 9 and made of a metal foil having the flexibility; and a fluid flow path 5 that is disposed outside of the heat dissipation structure 20 so that the cooling fluid 9 flowing inside thereof and the heatsink 7 may directly come into contact. Furthermore, on a surface of the heatsink that directly comes into contact with the cooling fluid 9, a fine recess 15 is disposed.

Abstract translation: 冷却结构包括散热构件20，其具有发热体8和散热体7，散热体7通过绝缘粘合剂层6粘附到发热体8的至少面向冷却流体9的表面，并且由具有 灵活性 以及布置在散热结构20外侧的流体流路5，使得流过其内的冷却流体9和散热器7可以直接接触。 此外，在与冷却流体9直接接触的散热器的表面上设置有细小凹部15。