- 专利标题: Semiconductor apparatus including magnetoresistive device
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申请号: US15131564申请日: 2016-04-18
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公开(公告)号: US09954030B2公开(公告)日: 2018-04-24
- 发明人: Yong-kyu Lee , Gwan-hyeob Koh , Hong-kook Min
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Gyeonggi-Do
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Gyeonggi-Do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2015-0127704 20150909
- 主分类号: H01L27/22
- IPC分类号: H01L27/22 ; H01L43/08 ; H01L27/20 ; H01L43/10
摘要:
A semiconductor apparatus includes a substrate, a first insulating layer on a logic region and a memory region of the substrate, a second insulating layer on the first insulating layer, a base insulating layer between the first insulating layer and second insulating layer over the logic region and the memory region, first interconnection structures passing the first insulating layer, second interconnection structures passing through the second insulating layer, a base interconnection structure passing through the base insulating layer over the logic region, and a variable resistance structure in the base insulating layer over the memory region. The variable resistance structure includes a lower electrode, a magnetoresistive device, and an upper electrode, which are sequentially stacked. The lower electrode and the upper electrode are electrically connected to one of the first interconnection structures and one of the second interconnection structures, respectively, over the memory region.
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