Invention Grant
- Patent Title: Methods for detecting endpoint for through-silicon via reveal applications
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Application No.: US15353305Application Date: 2016-11-16
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Publication No.: US09941178B2Publication Date: 2018-04-10
- Inventor: Alan Jeffrey Miller , Evelio Sevillano , Jorge Luque , Andrew D. Bailey, III , Qing Xu
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/66 ; H01L21/3065 ; H01L21/67 ; H01L21/768

Abstract:
Systems and methods for processing a semiconductor wafer includes a plasma processing chamber. The plasma processing chamber includes an exterior, an interior region with a wafer receiving mechanism and a viewport disposed on a sidewall of the plasma processing chamber providing visual access from the exterior to the wafer received on the wafer receiving mechanism. A camera is mounted to the viewport of the plasma processing chamber on the exterior and coupled to an image processor. The image processor includes pattern recognition logic to match images of emerging pattern captured and transmitted by the camera, to a reference pattern and to generate signal defining an endpoint when a match is detected. A system process controller coupled to the image processor and the plasma processing chamber receives the signal from the image processor and adjusts controls of one or more resources to stop the etching operation.
Public/Granted literature
- US20170062290A1 Methods for Detecting Endpoint for Through-Silicon Via Reveal Applications Public/Granted day:2017-03-02
Information query
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