Invention Grant
- Patent Title: Oxidation of copper in a copper etching solution by the use of oxygen and/or air as an oxidizing agent
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Application No.: US15301181Application Date: 2015-04-01
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Publication No.: US09920434B2Publication Date: 2018-03-20
- Inventor: Mats Andersson
- Applicant: SIGMA ENGINEERING AB
- Applicant Address: SE Karlstad
- Assignee: SIGMA ENGINEERING AB
- Current Assignee: SIGMA ENGINEERING AB
- Current Assignee Address: SE Karlstad
- Agency: Buchanan Ingersoll & Rooney P.C.
- Priority: EP14163061 20140401
- International Application: PCT/EP2015/057166 WO 20150401
- International Announcement: WO2015/150448 WO 20151008
- Main IPC: C23F1/46
- IPC: C23F1/46 ; H05K3/06 ; C23F1/18 ; C23F1/08

Abstract:
The present invention relates to a process of oxidizing copper in a copper etching solution by using oxygen gas and/or air as an oxidizing agent, the process comprising the steps of: a) introducing the oxidizing agent into an acidic reduced copper etching solution comprising Cl− and Cu+, b) stirring the solution obtained in step a), and thereby allowing the reaction 2Cu++½O2 (aq)+2H+→2Cu2++H2O to occur, thereby producing an oxidized copper etching solution comprising less Cu+ than the reduced copper etching solution. An advantage of the present invention is that it provides an improved process at least in terms of the speed of the oxidation and the quality of the etching.
Public/Granted literature
- US20170022616A1 OXIDATION OF COPPER IN A COPPER ETCHING SOLUTION BY THE USE OF OXYGEN AND/OR AIR AS AN OXIDIZING AGENT Public/Granted day:2017-01-26
Information query
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