Invention Grant
- Patent Title: Dynamic design attributes for wafer inspection
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Application No.: US14244859Application Date: 2014-04-03
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Publication No.: US09865512B2Publication Date: 2018-01-09
- Inventor: Thirupurasundari Jayaraman , Raghav Babulnath
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G01R31/265
- IPC: G01R31/265 ; H01L21/66 ; G06T7/00 ; G01N21/95

Abstract:
Methods and systems for dynamic design attributes for wafer inspection are provided. One method includes, at run time of a wafer inspection recipe, prompting a user of a wafer inspection tool on which the wafer inspection recipe is performed for information for a design based binning (DBB) process. The information includes one or more formulae for calculating design attributes from a design for a wafer. The design attributes are used to bin the defects in the DBB process. The method also includes performing inspection of a wafer according to an updated wafer inspection recipe. Performing the inspection includes binning defects detected on the wafer according to the DBB process in the updated wafer inspection recipe.
Public/Granted literature
- US20140303921A1 DYNAMIC DESIGN ATTRIBUTES FOR WAFER INSPECTION Public/Granted day:2014-10-09
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