Invention Grant
- Patent Title: Target for ultraviolet light generation, electron beam-excited ultraviolet light source, and production method for target for ultraviolet light generation
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Application No.: US14437345Application Date: 2013-09-06
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Publication No.: US09852898B2Publication Date: 2017-12-26
- Inventor: Yoshinori Honda , Hiroyuki Taketomi , Fumitsugu Fukuyo , Koji Kawai , Hidetsugu Takaoka , Takashi Suzuki
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2012-233978 20121023
- International Application: PCT/JP2013/074136 WO 20130906
- International Announcement: WO2014/065030 WO 20140501
- Main IPC: H01J63/06
- IPC: H01J63/06 ; H01J63/04 ; C09K11/77
Abstract:
A target for ultraviolet light generation comprises a substrate adapted to transmit ultraviolet light therethrough and a light-emitting layer, disposed on the substrate, for generating ultraviolet light in response to an electron beam. The light-emitting layer includes a powdery or granular oxide crystal containing Lu and Si doped with an activator (e.g., Pr:LPS and Pr:LSO crystals).
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