发明授权
- 专利标题: Fluid handling structure, lithographic apparatus and device manufacturing method
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申请号: US15016041申请日: 2016-02-04
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公开(公告)号: US09846372B2公开(公告)日: 2017-12-19
- 发明人: Rogier Hendrikus Magdalena Cortie , Paulus Martinus Maria Liebregts , Michel Riepen , Fabrizio Evangelista
- 申请人: ASML NETHERLANDS B.V.
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Pillsbury Winthrop Shaw Pittman, LLP
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
A fluid handling structure for a lithographic apparatus is disclosed, the fluid handling structure successively has, at a boundary from a space configured to contain immersion fluid to a region external to the fluid handling structure: an elongate opening or a plurality of openings arranged in a first line that, in use, are directed towards a substrate and/or a substrate table configured to support the substrate; a gas knife device having an elongate aperture in a second line; and an elongate opening or a plurality of openings adjacent the gas knife device.
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