发明授权
- 专利标题: Conveyance system
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申请号: US14390420申请日: 2013-03-07
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公开(公告)号: US09845193B2公开(公告)日: 2017-12-19
- 发明人: Makoto Yamamoto
- 申请人: MURATA MACHINERY, LTD.
- 申请人地址: JP Kyoto
- 专利权人: MURATA MACHINERY, LTD.
- 当前专利权人: MURATA MACHINERY, LTD.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2012-086392 20120405
- 国际申请: PCT/JP2013/056346 WO 20130307
- 国际公布: WO2013/150859 WO 20131010
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; B65G1/04 ; B65G1/137 ; H01L21/67 ; H01L21/677 ; G05B19/418
摘要:
A conveyance system includes storage racks that are provided near or adjacent to semiconductor manufacturing devices and store therein objects to be conveyed, a stacker crane that carries the objects into and out of the storage racks, vehicles that convey the objects, an ID tag reader that is provided to the stacker crane and reads ID tags of the objects; and a controller that is configured or programmed to, when identification information acquired by the ID tag reader R coincides with identification information contained in a conveyance command of an object, control the stacker crane to convey the object to a destination specified in the conveyance command. At least one section of each storage rack allows a gripper of each vehicle to take in and out the objects.
公开/授权文献
- US20150045937A1 CONVEYANCE SYSTEM 公开/授权日:2015-02-12
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