Invention Grant
- Patent Title: Magnetoresistance element with an improved seed layer to promote an improved response to magnetic fields
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Application No.: US14591213Application Date: 2015-01-07
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Publication No.: US09804234B2Publication Date: 2017-10-31
- Inventor: Cyril Dressler , Claude Fermon , Myriam Pannetier-Lecoeur , Marie-Claire Cyrille , Paolo Campiglio
- Applicant: Allegro MicroSystems, LLC
- Applicant Address: US MA Worcester FR Paris
- Assignee: Allegro MicroSystems, LLC,Commissariat à L'Energie Atomique et aux Energies Alternatives
- Current Assignee: Allegro MicroSystems, LLC,Commissariat à L'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: US MA Worcester FR Paris
- Agency: Daly, Crowley, Mofford & Durkee, LLP
- Main IPC: G11B5/39
- IPC: G11B5/39 ; G01R33/09 ; G01R33/00 ; H01L43/02 ; H01L43/08 ; H01L43/10 ; H01L43/12 ; H01F10/32 ; H01F41/30

Abstract:
A magnetoresistance element can have a substrate; a ferromagnetic seed layer consisting of a binary alloy of NiFe; and a first nonmagnetic spacer layer disposed under and directly adjacent to the ferromagnetic seed layer and proximate to the substrate, wherein the first nonmagnetic spacer layer is comprised of Ta or Ru. A method fabricating of fabricating a magnetoresistance element can include depositing a seed layer structure over a semiconductor substrate, wherein the depositing the seed layer structure includes depositing at least a ferromagnetic seed layer over the substrate. The method further can further include depositing a free layer structure over the seed layer structure, wherein the depositing the ferromagnetic seed layer comprises depositing the ferromagnetic seed layer in the presence of a motion along a predetermined direction and in the presence of a predetermined magnetic field having the same predetermined direction.
Public/Granted literature
- US20150192649A1 Magnetoresistance Element with an Improved Seed Layer to Promote an Improved Response to Magnetic Fields Public/Granted day:2015-07-09
Information query
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