Invention Grant
- Patent Title: Method and optoelectronic structure providing polysilicon photonic devices with different optical properties in different regions
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Application No.: US14467449Application Date: 2014-08-25
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Publication No.: US09768330B2Publication Date: 2017-09-19
- Inventor: Roy Meade , Karan Mehta , Efraim Megged , Jason Orcutt , Milos Popovic , Rajeev Ram , Jeffrey Shainline , Zvi Sternberg , Vladimir Stojanovic , Ofer Tehar-Zahav
- Applicant: MICRON TECHNOLOGY, INC. , Massachusetts Institute of Technology
- Applicant Address: US ID Boise US MA Cambridge
- Assignee: Micron Technology, Inc.,Massachusetts Institute of Technology
- Current Assignee: Micron Technology, Inc.,Massachusetts Institute of Technology
- Current Assignee Address: US ID Boise US MA Cambridge
- Agency: Perkins Coie LLP
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L31/0232 ; H01L31/0368 ; H01L27/144 ; H01L31/18
Abstract:
Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.
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