- 专利标题: Physical vapor deposition methods and systems to form semiconductor films using counterbalance magnetic field generators
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申请号: US14792597申请日: 2015-07-06
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公开(公告)号: US09761441B2公开(公告)日: 2017-09-12
- 发明人: Jeonghee Park , Jae Yeol Park
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR US CA Milpitas
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.,SEMICAT, INC.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.,SEMICAT, INC.
- 当前专利权人地址: KR US CA Milpitas
- 代理机构: Renaissance IP Law Group LLP
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; H01L21/02 ; C23C14/35 ; H01J37/34 ; H01L45/00 ; C23C14/06 ; H01J37/32
摘要:
Embodiments relate generally to semiconductor device fabrication and processes, and more particularly, to systems and methods that implement magnetic field generators configured to generate rotating magnetic fields to facilitate physical vapor deposition (“PVD”). In one embodiment, a system generates a first portion of a magnetic field adjacent a first circumferential portion of a substrate, and can generate a second portion of the magnetic field adjacent to a second circumferential portion of the substrate. The second circumferential portion is disposed at an endpoint of a diameter that passes through an axis of rotation to another endpoint of the diameter at which the first circumferential portion resides. The second peak magnitude can be less than the first peak magnitude. The system rotates the first and second portions of the magnetic fields to decompose a target material to form a plasma adjacent the substrate. The system forms a film upon the substrate.
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