Invention Grant
- Patent Title: Elastic wave element with interdigital transducer electrode
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Application No.: US14809994Application Date: 2015-07-27
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Publication No.: US09748924B2Publication Date: 2017-08-29
- Inventor: Tomoya Komatsu , Hiroyuki Nakamura , Tetsuya Tsurunari , Joji Fujiwara , Hidekazu Nakanishi
- Applicant: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Applicant Address: JP Kadoma-Shi
- Assignee: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Current Assignee: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Current Assignee Address: JP Kadoma-Shi
- Agency: Lando & Anastasi, LLP
- Priority: JP2011-061959 20110322
- Main IPC: H03H9/25
- IPC: H03H9/25 ; H03H9/02 ; H01L41/047

Abstract:
An elastic wave device includes an interdigital transducer (IDT) electrode in contact with a piezoelectric substrate having a bus bar electrode region including one of a first bus bar electrode and a second bus bar electrode of the IDT electrode, an alternately disposed region where first electrode fingers are alternately disposed with second electrode fingers of the IDT electrode, and an intermediate region including one of the first electrode fingers and the second electrode fingers. A dielectric film is formed in at least part of the intermediate region and in contact with an upper surface of the IDT electrode. The dielectric film includes a medium in which an acoustic velocity of a transverse wave propagating in the dielectric film is lower than an acoustic velocity of a main elastic wave of the alternately disposed region. The dielectric film is not formed in the alternately disposed region.
Public/Granted literature
- US20150333731A1 ELASTIC WAVE ELEMENT WITH INTERDIGITAL TRANSDUCER ELECTRODE Public/Granted day:2015-11-19
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