Invention Grant
- Patent Title: Tunable voltage margin access diodes
-
Application No.: US15343602Application Date: 2016-11-04
-
Publication No.: US09705079B2Publication Date: 2017-07-11
- Inventor: Mohit Bajaj , Arpan K. Deb , Aniruddha Konar , Kota V. R. M. Murali , Rajan K. Pandey , Kumar R. Virwani
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent L. Jeffrey Kelly
- Main IPC: H01L29/24
- IPC: H01L29/24 ; H01L29/16 ; H01L45/00 ; H01L27/24 ; H01L27/22 ; H01L29/861 ; H01L21/02 ; H01L29/66 ; H01L29/15

Abstract:
The present invention relates generally to high current density access devices (ADs), and more particularly, to a structure and method of forming tunable voltage margin access diodes in phase change memory (PCM) blocks using layers of copper-containing mixed ionic-electronic conduction (MIEC) materials. Embodiments of the present invention may use layers MIEC material to form an access device that can supply high current-densities and operate reliably while being fabricated at temperatures that are compatible with standard BEOL processing. By varying the deposition technique and amount of MIEC material used, the voltage margin (i.e. the voltage at which the device turns on and the current is above the noise floor) of the access device may be tuned to specific operating conditions of different memory devices.
Public/Granted literature
- US20170047515A1 TUNABLE VOLTAGE MARGIN ACCESS DIODES Public/Granted day:2017-02-16
Information query
IPC分类: