Invention Grant
- Patent Title: Positioning system, a lithographic apparatus and a method for positional control
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Application No.: US14956110Application Date: 2015-12-01
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Publication No.: US09671702B2Publication Date: 2017-06-06
- Inventor: Hans Butler , Henrikus Herman Marie Cox
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03B27/53 ; G03B27/58

Abstract:
A positioning system for controlling a relative position between a first component and a second component of a lithographic apparatus, wherein a position of each component is defined by a set of orthogonal coordinates, the positioning system including: a measuring device configured to determine an error in the momentary position of one of the components with respect to a setpoint position in a measurement coordinate; and a controller configured to control movement of the other component in a control coordinate based on the determined error; wherein the measurement coordinate is different from the control coordinate.
Public/Granted literature
- US20160077450A1 POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD FOR POSITIONAL CONTROL Public/Granted day:2016-03-17
Information query
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