- 专利标题: Volume wave resonators on micromachined vertical structures
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申请号: US14349347申请日: 2012-10-05
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公开(公告)号: US09666786B2公开(公告)日: 2017-05-30
- 发明人: Sylvain Ballandras , Gwenn Ulliac , Blandine Edouard-Guichardaz , Thomas Baron , Jean-Yves Rauch
- 申请人: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.) , UNIVERSITE DE FRANCHE-COMTE , ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES
- 申请人地址: FR Paris FR Besancon FR Besancon
- 专利权人: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE DE FRANCHE-COMTE,ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES
- 当前专利权人: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE DE FRANCHE-COMTE,ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES
- 当前专利权人地址: FR Paris FR Besancon FR Besancon
- 代理机构: Young & Thompson
- 优先权: FR1158964 20111005
- 国际申请: PCT/EP2012/069726 WO 20121005
- 国际公布: WO2013/050533 WO 20130411
- 主分类号: H01L41/08
- IPC分类号: H01L41/08 ; H03H9/02 ; H03H3/04 ; H03H9/13 ; H03H9/17 ; H01L41/047 ; H01L41/18
摘要:
A bulk wave piezoelectric resonator operating at a predetermined frequency includes a substrate block, having a plane face, a first thickness and consisting of a first material, a resonant plate having a length, width and second thickness, and consisting of a second piezoelectric material, first and second metal electrodes at least partly covering the resonant plate on each side and partly facing each other. The resonant plate is fixed perpendicularly in the vicinity of the plane face of the substrate block so that the width of the resonant plate and the first thickness of the substrate block have the same direction, and the first material, the second material, the first thickness of the block of substrate, the length, the width, the second thickness of the resonant plate are configured for trapping bulk waves at the operating frequency of the resonator and for producing a plane-plane type bulk wave piezoelectric resonator.
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