Invention Grant
- Patent Title: Semiconductor device with composite drift region and related fabrication method
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Application No.: US14279991Application Date: 2014-05-16
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Publication No.: US09666671B2Publication Date: 2017-05-30
- Inventor: Zhihong Zhang , Hongning Yang , Jiang-Kai Zuo
- Applicant: Zhihong Zhang , Hongning Yang , Jiang-Kai Zuo
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/78 ; H01L29/66 ; H01L29/36 ; H01L29/06 ; H01L29/08 ; H01L21/265

Abstract:
A device includes a semiconductor substrate, a body region in the semiconductor substrate having a first conductivity type and in which a channel is formed during operation, source and drain regions in the semiconductor substrate and having a second conductivity type, the source region being disposed on the body region, and a composite drift region in the semiconductor substrate, having the second conductivity type, and through which charge carriers from the source region drift to reach the drain region after passing through the channel. The composite drift region includes a first section adjacent the channel, a second section adjacent the drain region, and a third section disposed between the first and second sections. The first and second sections have a lower effective dopant concentration level than the third section.
Public/Granted literature
- US20150333177A1 SEMICONDUCTOR DEVICE WITH COMPOSITE DRIFT REGION AND RELATED FABRICATION METHOD Public/Granted day:2015-11-19
Information query
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