Invention Grant
- Patent Title: Wafer storage apparatus having gas charging portions and semiconductor manufacturing apparatus using the same
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Application No.: US14579609Application Date: 2014-12-22
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Publication No.: US09666454B2Publication Date: 2017-05-30
- Inventor: In-Ho Choi , Young-Suk Sim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2014-0007936 20140122
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/673
Abstract:
A wafer storage apparatus includes a wafer stacking portion that encloses an internal space with an open front side for receiving a plurality of wafers; a rear cover portion disposed on the back side of the wafer stacking portion; and a gas charging portion that includes a plurality of gas supply blocks disposed on the inner side of the rear cover portion, a plurality of gas supply pipes connected to the gas supply blocks via through holes in the rear cover portion, and a gas supply unit connected to the gas supply pipes.
Public/Granted literature
Information query
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