Invention Grant
- Patent Title: Fabrication methods of transparent conductive electrode and array substrate
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Application No.: US14436576Application Date: 2014-09-15
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Publication No.: US09659975B2Publication Date: 2017-05-23
- Inventor: Meili Wang , Fengjuan Liu , Chunsheng Jiang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Collard & Roe, P.C.
- Priority: CN201410064958 20140225
- International Application: PCT/CN2014/086478 WO 20140915
- International Announcement: WO2015/127776 WO 20150903
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L27/12 ; G02F1/1343

Abstract:
Fabrication methods of a transparent conductive electrode (301) and an array substrate are provided. The fabrication method of the transparent conductive electrode (301) comprises: forming a sacrificial layer pattern (201) on a substrate (10) having a first region (A1) and a second region (A2) adjacent to each other, wherein the sacrificial layer pattern (201) is located in the second region (A2), and has an upper sharp corner profile formed on a side adjacent to the first region (A1); forming a transparent conductive thin-film (30) in the first region (A1) and the second region (A2) of the substrate (10) with the sacrificial layer pattern (201) formed thereon, wherein a thickness ratio of the transparent conductive thin-film (30) to the sacrificial layer pattern (201) is less than or equal to 1:1.5, and the transparent conductive thin-film (30) is disconnected at the upper sharp corner profile of the sacrificial layer pattern (201), such that at least a part of a side surface of the sacrificial layer pattern (201) facing the first region (A1) is exposed; and removing the sacrificial layer pattern (201) so as to reserve the transparent conductive thin-film (30) in the first region as the transparent conductive electrode (301).
Public/Granted literature
- US20160086981A1 FABRICATION METHODS OF TRANSPARENT CONDUCTIVE ELECTRODE AND ARRAY SUBSTRATE Public/Granted day:2016-03-24
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