- 专利标题: Method for producing a pressure sensor and corresponding sensor
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申请号: US14383092申请日: 2013-03-06
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公开(公告)号: US09643836B2公开(公告)日: 2017-05-09
- 发明人: Sebastiano Brida , Jean-Francois Le Neal
- 申请人: AUXITROL S.A. , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
- 申请人地址: FR Bourges FR Paris
- 专利权人: AUXITROL S.A.,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
- 当前专利权人: AUXITROL S.A.,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
- 当前专利权人地址: FR Bourges FR Paris
- 代理机构: Blakely Sokoloff Taylor & Zafman LLP
- 优先权: FR1252042 20120306
- 国际申请: PCT/EP2013/054531 WO 20130306
- 国际公布: WO2013/131973 WO 20130912
- 主分类号: H01S4/00
- IPC分类号: H01S4/00 ; G01R3/00 ; B81B3/00 ; G01L9/04 ; G01L9/06 ; B81C1/00 ; B32B38/08 ; B81B7/02 ; G01L7/08 ; G01L9/00 ; G01L19/14 ; B81B7/00 ; G01L19/00
摘要:
The invention relates to a method for producing a pressure sensor, comprising the following steps: assembling a support substrate with a deformable membrane on which strain gauges have been deposited, wherein the deformable membrane comprises a thinned area at the center thereof, the support substrate is disposed on top of the deformable membrane, the support substrate comprises an upper surface and a lower surface in contact with the deformable membrane, and the support substrate also comprises lateral recesses arranged on top of the strain gauges and a central recess arranged on top of the thinned area of the membrane, so as to obtain a micromechanical structure; and, once the assembly has been obtained, depositing, in a single step, at least one conductive material on the upper surface of the support and in the lateral recesses of the support, said conductive material extending into the recesses in order to be in contact with the strain gauges so as to form electrical contacts in contact with the strain gauges.
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