Invention Grant
- Patent Title: Metallized junction FinFET structures
-
Application No.: US14929307Application Date: 2015-10-31
-
Publication No.: US09634028B2Publication Date: 2017-04-25
- Inventor: Bruce B. Doris , Pranita Kerber , Alexander Reznicek , Joshua M. Rubin
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Otterstedt, Ellenbogen & Kammer, LLP
- Agent Daniel P. Morris
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L27/12 ; H01L21/84 ; H01L29/45 ; H01L29/66 ; H01L21/285 ; H01L21/324 ; H01L29/16 ; H01L29/161 ; H01L21/02 ; H01L29/08 ; H01L29/06 ; H01L21/283

Abstract:
FinFET devices are provided wherein the current path is minimized and mostly limited to spacer regions before the channel carriers reach the metal contacts. The fins in the source/drain regions are metallized to increase the contact area and reduce contact resistance.Selective removal of semiconductor fins in the source/drain regions following source/drain epitaxy facilitates replacement thereof by the metallized fins. A spacer formed subsequent to source/drain epitaxy prevents the etching of extension/channel regions during semiconductor fin removal.
Public/Granted literature
- US20160343572A1 METALLIZED JUNCTION FINFET STRUCTURES Public/Granted day:2016-11-24
Information query
IPC分类: