发明授权
US09588445B2 Projection objective for a microlithographic projection exposure apparatus 有权
微光刻投影曝光装置的投影物镜

Projection objective for a microlithographic projection exposure apparatus
摘要:
A projection objective of a microlithographic projection exposure apparatus contains a plurality of optical elements arranged in N>−2 successive sections A1 to AN of the projection objective which are separated from one another by pupil planes or intermediate image planes. According to the invention, in order to correct a wavefront deformation, at least two optical elements each have an optically active surface locally reprocessed aspherically. A first optical element is in this case arranged in one section Aj, j=1 . . . N and a second optical element is arranged in another section Ak, k=1 . . . N, the magnitude difference |k−j| being an odd number.
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