发明授权
- 专利标题: Projection objective for a microlithographic projection exposure apparatus
- 专利标题(中): 微光刻投影曝光装置的投影物镜
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申请号: US15008519申请日: 2016-01-28
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公开(公告)号: US09588445B2公开(公告)日: 2017-03-07
- 发明人: Norbert Wabra , Robert Eder
- 申请人: Carl Zeiss SMT GmbH
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 主分类号: G03B27/32
- IPC分类号: G03B27/32 ; G03B27/42 ; G03B27/54 ; G03B27/68 ; G03F7/20 ; G02B27/00
摘要:
A projection objective of a microlithographic projection exposure apparatus contains a plurality of optical elements arranged in N>−2 successive sections A1 to AN of the projection objective which are separated from one another by pupil planes or intermediate image planes. According to the invention, in order to correct a wavefront deformation, at least two optical elements each have an optically active surface locally reprocessed aspherically. A first optical element is in this case arranged in one section Aj, j=1 . . . N and a second optical element is arranged in another section Ak, k=1 . . . N, the magnitude difference |k−j| being an odd number.
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