Invention Grant
US09580298B2 Micro-electro-mechanical system (MEMS) structures and design structures
有权
微机电系统（MEMS）结构和设计结构
- Patent Title: Micro-electro-mechanical system (MEMS) structures and design structures
- Patent Title (中): 微机电系统（MEMS）结构和设计结构
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Application No.: US14883113Application Date: 2015-10-14
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Publication No.: US09580298B2Publication Date: 2017-02-28
- Inventor: Christopher V. Jahnes , Anthony K. Stamper
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran Cole & Calderon P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B81B3/00 ; H01G5/18 ; B81C1/00
Abstract:
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming at least one fixed electrode on a substrate. The method further includes forming a Micro-Electro-Mechanical System (MEMS) beam with a varying width dimension, as viewed from a top of the MEMS beam, over the at least one fixed electrode.
Public/Granted literature
- US20160031699A1 Micro-Electro-Mechanical System (MEMS) Structures And Design Structures Public/Granted day:2016-02-04
Information query
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